Publications 2011

  • 11_17
    Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl)(pyrrolyl)ruthenium and Oxygen
    K. Kukli, M. Kemell, E. Puukilainen, J. Aarik, A. Aidla, T. Sajavaara, M. Laitinen, M. Tallarida, J. Sundqvist, M. Ritala, M. Leskelä
    Journal of the Electrochemical Society 158/3 (2011) D158-D165.
    Online (DOI)
  • 11_16
    In situ determination of laser induced degradation of micro-mirror arrays
    A. Mai, U. Dauderstadt, D. Pahner, M. Krellmann, D. Schmeißer, M. Wagner
    Students and Young Scientists Workshop "Photonics and Microsystems", 2011 International, S. 84-88. DOI: 10.1109/STYSW.2011.6155850
    Online (DOI)
  • 11_15
    Control of the Crystalline Polymorph, Molecular Dipole and Chain Orientations in P(VDF-HFP) for High Electrical Energy Storage Application
    D. Mandal, K. Henkel, D. Schmeißer
    International Conference on Nanoscience, Technology and Societal Implications (NSTSI), 2011, DOI: 10.1109/NSTSI.2011.6111801
    Online (DOI)
  • 11_14
    Ultrathin TaN/Ta barrier modifications to fullfill next technology node requirements
    L. Gerlich, S. Ohsiek, C. Klein, M. Geiss, M. Friedemann, P.  Kücher, D.  Schmeißer
    Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, DOI: 10.1109/IITC.2011.5940322
    Online (DOI)
  • 11_13
    Fullerenol as probed by Synchrotron X-Ray Photoemission and Absorption Spectroscopy
    D. Friedrich, K. Henkel, M. Richter, D. Schmeißer
    BioNanoScience 1 (2011) 218-223
    Online (DOI)
    An author-created version may be downloaded here for personal use only. The final publication is available at (see DOI above).
  • 11_12
    Atomic-scale engineering of future high-k dynamic random access memory dielectrics: The example of partial Hf substitution by Ti in BaHfO3
    P. Dudek, G. Lupina, G. Kozlowski, P. Zaumseil, J. Bauer, O. Fursenko, J. Dabrowski, R. Schmidt, G. Lippert, H.-J. Müssig, T. Schroeder, D. Schmeißer, E. Zschech
    Journal of Vacuum Science and Technology B 29/1 (2011) 01AC03
    Online (DOI)
  • 11_11
    Experimental electronic structure of In2O3 and Ga2O3
    C. Janowitz, V. Scherer, M. Mohamed, A. Krapf, H. Dwelk, R. Manzke, Z. Galazka, R. Uecker, K. Irmscher, R. Fornari, M. Michling, D. Schmeißer, J. R. Weber, J. B. Varley, C. G. Van deWalle
    New Journal of Physics 13 (2011) 085014
    Online (DOI)
  • 11_10
    Comment on “Preparation and Characterization of Silver-Poly(vinylidene fluoride) Nanocomposites: Formation of Piezoelectric Polymorph of Poly(vinylidene fluoride)”
    D. Mandal, K. Henkel, D. Schmeißer
    The Journal of Physical Chemistry B 115 (2011) 10567-10569
    Online (DOI)
  • 11_09
    Atomic layer deposition reactor for fabrication of metal oxides
    K. Kolanek, M. Tallarida, M. Michling, K. Karavaev, D. Schmeißer
    Physica Status Solidi C 8 (2011) 1287-1292
    Online (DOI)
  • 11_08
    Substrate Reactivity Effects in the Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum on Ruthenium
    M. Tallarida, K. Kukli, M. Michling, M. Ritala, M. Leskelä, D. Schmeißer
    Chemistry of Materials 23 (2011) 3159-3168
    Online (DOI)
  • 11_07
    Growth of TiO2 with Thermal and Plasma Enhanced Atomic Layer Deposition
    M. Tallarida, D. Friedrich, M. Städter, M. Michling, D. Schmeißer
    Journal of Nanoscience and Nanotechnology 11 (2011) 8049-8053
    Online (DOI)
  • 11_06
    Surface chemistry and Fermi level movement during the self-cleaning of GaAs by trimethyl-aluminum
    M. Tallarida, C. Adelmann, A. Delabie, S. Van Elshocht, M. Caymax, D. Schmeißer
    Applied Physícs Letters 99 (2011) 042906
    Online (DOI)
  • 11_05
    Influence of Na on the structure of Bi4Ti3O12 films deposited by liquid-delivery spin MOCVD
    J. Schwarzkopf, R. Dirsyte, A. Devi, A. Kwasniewski, M. Schmidbauer, G. Wagner, M. Michling, D. Schmeißer, R. Fornari
    Thin Solid Films 519 (2011) 5754-5759
    Online (DOI)
  • 11_04
    Atomic layer deposition of nanolaminate oxide films on Si
    M. Tallarida, M. Weisheit, K. Kolanek, M. Michling, H. J. Engelmann, D. Schmeißer
    Journal of Nanoparticle Research 13 (2011) 5975-5983
    Online (DOI)
  • 11_03
    Pr-O-Al-N dielectrics for metal insulator semiconductor stacks
    K. Henkel, M. Torche, R. Sohal, K. Karavaev, Y. Burkov, C. Schwiertz, D. Schmeißer
    Physica Status Solidi A 208/2 (2011) 317-329
    Online (DOI)
  • 11_02
    Spin coated organic ferroelectric films for non volatile memories
    K. Müller, K. Henkel, D. Mandal, B. Seime, I. Paloumpa, D. Schmeißer
    Physica Status Solidi A 208/2 (2011) 330-342
    Online (DOI)
  • 11_01
    Field effect transistors on graphitized polymer surfaces
    Y. Koval, I. Lazareva, P. Müller, K. Müller, K. Henkel, D. Friedrich
    Physica Status Solidi B 248/2 (2011) 299-308
    online (DOI)

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