UBICO

Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen

Author(s)
Stolz, Michael, Mrosk, Andreas, Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Conrad, Holger, Gaudet, Matthieu, Schenk, Harald
Type
Conference Proceeding refering
Year of publication
2019
Publisher name
VDE-Verlag
Source
MikroSystemTechnik-Kongress, Berlin, Germany, 2019, S. 366 - 369
URL
https://www.ipms.fraunhofer.de/de/events/2019/mst-kongress.html

Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren

Author(s)
Spitz, Barbara, Wall, Franziska, Schenk, Hermann, Melnikov, Anton, Ehrig, Lutz, Langa, Sergiu, Stolz, Michael, Kaiser, Bert, Conrad, Holger, Schenk, Harald, Pufe, Wolfram
Type
Conference Proceeding refering
Year of publication
2019
Publisher name
VDE-Verlag
Source
MikroSystemTechnik-Kongress, Berlin, Germany, 2019, S. 54 - 57

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

Author(s)
Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David
Type
Scientific Article ref.
Year of publication
2019
Source
Microsystems and Nanoengineering
Issue/Journal number
5
ISSN
2055-7434
DOI
http://dx.doi.org/10.1038/s41378-019-0095-9

Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach

Author(s)
Borcia, Rodica, Bestehorn, Michael, Uhlig, Sebastian, Gaudet, Matthieu, Schenk, Harald
Type
Scientific Article ref.
Year of publication
2018
Microfluidic devices; Thin fluid films
Source
Physical Review Fluids
Volume
3
Issue/Journal number
8
ISSN
2469-990X
URL
https://journals.aps.org/prfluids/abstract/10.1103/PhysRevFluids.3.084202
DOI
http://dx.doi.org/10.1103/PhysRevFluids.3.084202

Electrostatically driven in-plane silicon micropump for modular configuration

Author(s)
Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald
Type
Scientific Article ref.
Year of publication
2018
micropump; electrostatic actuation; nano e-drive; in-plane reciprocating displacement micropump; MEMS
Source
Micromachines
Volume
9
Issue/Journal number
4
ISSN
2072-666X
DOI
http://dx.doi.org/10.3390/mi9040190

MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben

Author(s)
Schenk, Harald, Conrad, Holger
Type
patent
Year of publication
2018
Patent number
WO18193109

Advances in MOEMS technologies for high quality imaging systems

Author(s)
Schenk, Harald, Wagner, Michael, Grahmann, Jan, Merten, André
Editor(s)
Kye, Jongwook, Owa, Soichi
Type
conference publication
Year of publication
2018
Publisher name
Bellingham, Washington : SPIE
Source
Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States
ISBN
978-1-5106-1666-0
978-1-5106-1667-7
DOI
http://dx.doi.org/10.1117/12.2297399
Proceedings of SPIE ; volume 10587

CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen

Author(s)
Conrad, Holger, Ehrig, Lutz, Kaiser, Bert, Schenk, Hermann, Schuffenhauer, David, Stolz, Michael, Gaudet, Matthieu, Schenk, Harald
Type
conference publication
Year of publication
2018
Publisher name
Berlin : Deutsche Gesellschaft für Akustik e.V. (DEGA)
Source
Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung für Akustik, 19.-22. März 2018, München, S. 892 - 894
ISBN
978-3-939296-13-3

MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications

Author(s)
Ehrig, Lutz, Kaiser, Bert, Conrad, Holger, Schenk, Hermann, Schuffenhauer, David, Stolz, Michael, Gaudet, Matthieu, Schenk, Harald, Kolkovsky, Vladimir
Type
Conference Proceeding refering
Year of publication
2018
Source
Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30, S. 189 - 192

Mikromechanical devices with mechanical actuators

Author(s)
Conrad, Holger, Gaudet, Matthieu, Schenk, Harald, Uhlig, Sebastian
Type
patent
Year of publication
2018
Patent number
EP 3568595 A1

Electrostatic bending actuators with liquid filled nanometer scale gap

Author(s)
Gaudet, Matthieu, Uhlig, Sebastian, Stolz, Michael, Arscott, S., Conrad, Holger, Langa, Sergiu, Kaiser, Bert, Schenk, Harald
Type
conference publication
Year of publication
2017
Publisher name
Piscataway, NJ : IEEE
Source
MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017, S. 175 - 178
ISBN
978-1-5090-5078-9
978-1-5090-5079-6
URL
http://ieeexplore.ieee.org/document/7863369/

A contribution to the expansion of the applicability of electrostatic forces in micro transducers

Author(s)
Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Uhlig, Sebastian, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schimmanz, Klaus
Type
conference publication
Year of publication
2017
Publisher name
Bellingham, Washington, USA : SPIE
Source
MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States
ISBN
978-1-5106-0674-6
978-1-5106-0673-9
DOI
http://dx.doi.org/10.1117/12.2249575
Proceedings of SPIE ; 10116

Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive

Author(s)
Langa, Sergiu, Conrad, Holger, Kaiser, Bert, Stolz, Michael, Gaudet, Matthieu, Uhlig, Sebastian, Schimmanz, Klaus, Schenk, Harald
Type
Scientific Article ref.
Year of publication
2017
Source
Microsystem Technologies, S. 5697 - 5708
Volume
23
Issue/Journal number
1
ISSN
1432-1858
DOI
http://dx.doi.org/10.1007/s00542-017-3360-6

CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators

Author(s)
Conrad, Holger, Gaudet, Matthieu, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schenk, Harald
Type
conference publication
Year of publication
2017
Publisher name
Berlin [u.a.] : VDE-Verlag
Source
MikroSystemTechnik Kongress 2017, München, Germany, 23.-25. Oktober 2017, S. 219 - 222
ISBN
978-3-8007-4491-6

Electrostatically in-plane driven silicon micropump for modular configuration

Author(s)
Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald
Type
conference publication
Year of publication
2017
Publisher name
Enschede : University of Twente
Source
Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands, S. 57 - 60
URL
http://publica.fraunhofer.de/dokumente/N-477736.html

Ion-sensitive structure and method of manufacturing the same

Author(s)
Kurth, Eberhard, Kunath, Christian, Schenk, Harald
Type
patent
Year of publication
2016
Patent number
US 2016274057

A novel electrostatic actuator class

Author(s)
Conrad, Holger, Kaiser, Bert, Gaudet, Matthieu, Langa, Sergiu, Stolz, Michael, Uhlig, Sebastian, Schimmanz, Klaus, Schenk, Harald
Type
Scientific Article ref.
Year of publication
2016
Source
Procedia Engineering, S. 1533 - 1536
Volume
168
ISSN
1877-7058
DOI
http://dx.doi.org/10.1016/j.proeng.2016.11.454

Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique

Author(s)
Kolkovsky, Vladimir, Stübner, R., Langa, Sergiu, Wende, U., Kaiser, Bert, Conrad, Holger, Schenk, Harald
Type
Scientific Article ref.
Year of publication
2016
Source
Solid-State Electronics, S. 89 - 95
Volume
123
ISSN
0038-1101
DOI
http://dx.doi.org/10.1016/j.sse.2016.06.005

A novel electrostatic micro-actuator class and its application potential for optical MEMS

Author(s)
Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Uhlig, Sebastian, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schimmanz, Klaus
Type
conference publication
Year of publication
2016
Publisher name
Piscataway, NJ : IEEE
Source
2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings, S. 311-1 - 311-2
ISBN
978-1-5090-1036-3
DOI
http://dx.doi.org/10.1109/OMN.2016.7565867

About stress in filled DRIE-trenches

Author(s)
Kaiser, Bert, Grashoff, Thomas, Drabe, Christian, Conrad, Holger, Schenk, Harald
Type
Scientific Article ref.
Year of publication
2015
Source
Journal of Micromechanics and Microengineering (JMM), S. 8085003
Volume
25
Issue/Journal number
8
ISSN
0960-1317
URL
http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003

A small-gap electrostatic micro-actuator for large deflections

Author(s)
Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam
Type
Scientific Article ref.
Year of publication
2015
Source
Nature Communications, S. 10078
Issue/Journal number
6
ISSN
2041-1723
DOI
http://dx.doi.org/10.1038/ncomms10078

Spatially resolved contrast measurement of diffractive micromirror arrays

Author(s)
Sicker, Cornelius, Heber, Jörg, Berndt, Dirk, Rückerl, Florian, Tinevez, Jean-Yves, Shorte, Spencer, Wagner, Michael, Schenk, Harald
Type
Scientific Article not ref.
Year of publication
2015
Publisher name
Bellingham, Wash. : SPIE
Source
MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States, S. 93750-1 - 93750-10
ISBN
978-1-62841-465-3
Proceedings of SPIE ; 9375

Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers)

Author(s)
Schenk, Harald, Grahmann, Jan, Wagner, Hans-Joachim, Ostendorf, Ralf, Rattunde, Marcel
Type
patent
Year of publication
2015
Patent number
US 2016336720

Widely tunable quantum cascade lasers for spectroscopic sensing

Author(s)
Wagner, J., Ostendorf, Ralf, Grahmann, Jan, Merten, A., Hugger, S., Jarvis, J.-P., Fuchs, F., Boscovic, D., Schenk, Harald
Editor(s)
Razeghi, Manijeh
Type
conference publication
Year of publication
2015
Publisher name
Bellingham, Wash. : SPIE
Source
Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States, S. 937012-1 - 937012-6
ISBN
978-1-62841-460-8
Proceedings of SPIE ; 9370

Micromechanical element

Author(s)
Conrad, Holger, Schenk, Harald, Schirrmann, Christian, Zimmer, Fabian, Schmidt, Jan-Uwe, Sandner, Thilo
Type
patent
Year of publication
2015
Patent number
US 9164277

MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben

Author(s)
Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Schimmanz, Klaus, Langa, Sergiu, Kaiser, Bert
Type
patent
Year of publication
2015
Patent number
WO 16202790

Micro-scanning mirrors for high-power laser applications in laser surgery

Author(s)
Sandner, Thilo, Kimme, S., Grashoff, Thomas, Todt, U., Graf, A., Tulea, C., Lenenbach, A., Schenk, Harald
Type
conference publication
Year of publication
2014
Publisher name
Bellingham : SPIE Press
Source
MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States, S. 897705-1 - 897705-11
ISBN
978-0-8194-9890-8
Proceedings of SPIE ; 8977

Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera

Author(s)
Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schroedter, R., Schenk, Harald
Type
conference publication
Year of publication
2014
Publisher name
Bellingham : SPIE Press
Source
SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014, S. 897717-1 - 897717-9
ISBN
978-0-8194-9890-8
Proceedings of SPIE ; 8977

Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera

Author(s)
Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schroedter, Richard, Schenk, Harald
Type
Scientific Article not ref.
Year of publication
2014
Source
Journal of Micro/Nanolithography, MEMS, and MOEMS, S. 011114-1 - 011114-10
Volume
13
Issue/Journal number
1
ISSN
1932-5134

Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator

Author(s)
Schirrmann, Christian, Costache, Florenta Adriana, Bornhorst, Kirstin, Pawlik, Boscij, Rieck, Andreas, Schenk, Harald
Type
Scientific Article ref.
Year of publication
2014
Source
Procedia Engineering, S. 1553 - 1556
Issue/Journal number
87
ISSN
1877-7058

Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers

Author(s)
Sandner, Thilo, Grashoff, Thomas, Gaumont, E., Schenk, Harald, Kenda, A.
Type
Scientific Article not ref.
Year of publication
2014
Source
Journal of Micro/Nanolithography, MEMS, and MOEMS, S. 011115-1 - 011115-14
Volume
13
Issue/Journal number
1
ISSN
1932-5134

Apparatus and method for guiding optical waves

Author(s)
Costache, Florenta Adriana, Blasl, Martin, Schenk, Harald
Type
patent
Year of publication
2014
Patent number
US 9046704

MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring

Author(s)
Hintschich, Susanne, Pügner, Tino, Knobbe, Jens, Schröder, Julia, Reinig, Peter, Grüger, Heinrich, Schenk, Harald
Type
Scientific Article not ref.
Year of publication
2014
Source
Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK, S. 430 - 434

Elektrostatisch auslenkbares mikromechanisches Bauelement

Author(s)
Langa, Sergiu, Conrad, Holger, Schenk, Harald, Stolz, Michael
Type
patent
Year of publication
2014
Patent number
DE 10 2014 225 934.7

Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings

Author(s)
Grahmann, Jan, Merten, André, Ostendorf, Ralf, Fontenot, M., Bleh, Daniela, Schenk, Harald, Wagner, Hans-Joachim
Type
Scientific Article not ref.
Year of publication
2014
Publisher name
Bellingham : SPIE Press
Source
SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014, S. 897708-1 - 897708-11
ISBN
978-0-8194-9890-8
Proceedings of SPIE ; 8977

MEMS basiertes Durchstimmen von Lasern

Author(s)
Grahmann, Jan, Wagner, Hans-Joachim, Ostendorf, Ralf, Schenk, Harald, Rattunde, Marcel
Type
patent
Year of publication
2014
Patent number
DE 10 2014 201 701.7

Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components

Author(s)
Bleh, D., Ostendorf, Ralf, Merten, A., Grahmann, Jan, Schenk, Harald, Kunzer, M., Schmidt, R., Wagner, J.
Type
conference publication
Year of publication
2014
Source
International Quantum Cascade Lasers School & Workshop (IQCLSW), Policoro, Italy, S. 1 - 2
URL
http://www.iqclsw2014.cnr.it/wp-content/uploads/2014/03/Bleh-IQCLSW2014.pdf?0f100a

Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

Author(s)
Kenda, Andreas, Kraft, Martin, Tortschanoff, Andreas, Scherf, Werner, Sandner, Thilo, Schenk, Harald, Luettjohann, Stephan, Simon, Apolline
Type
Scientific Article not ref.
Year of publication
2014
Publisher name
Bellingham, Wash. : SPIE
Source
Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States, S. 910102-1 - 910102-10
ISBN
978-1-62841-038-9
Proceedings of SPIE ; 9101

Micro mirrors for high-speed laser deflections and patterning

Author(s)
Schenk, Harald, Grahmann, Jan, Sandner, Thilo, Wagner, Michael, Dauderstädt, Ulrike, Schmidt, Jan-Uwe
Type
Scientific Article not ref.
Year of publication
2014
Source
Physics Procedia, S. 7 - 18
Volume
56
ISSN
1875-3892
DOI
http://dx.doi.org/10.1016/j.phpro.2014.08.090

Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer

Author(s)
Grüger, Heinrich, Knobbe, Jens, Pügner, Tino, Schenk, Harald
Type
conference publication
Year of publication
2013
Publisher name
Bellingham, Wash. : SPIE
Source
SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 86160-1 - 86160-13
ISBN
978-0-8194-9385-9
DOI
http://dx.doi.org/10.1117/12.2004215
Proceedings of SPIE ; 8616

First application close measurements applying the new hybrid integrated MEMS spectrometer

Author(s)
Grüger, Heinrich, Pügner, Tino, Knobbe, Jens, Schenk, Harald
Type
conference publication
Year of publication
2013
Publisher name
Bellingham, Wash. : SPIE
Source
SPIE Conference Next-Generation Spectroscopic Technologies VI, Baltimore, S. 872609-1 - 872609-9
ISBN
978-0-8194-9517-4
DOI
http://dx.doi.org/10.1117/12.2016085
Proceedings of SPIE ; 8726

Micro-scanning mirrors for high-power laser applications in laser surgery

Author(s)
Sandner, Thilo, Kimme, S., Grashoff, Thomas, Todt, U., Graf, A., Schenk, Harald, Tulea, C., Lenenbach, A.
Type
conference publication
Year of publication
2013
Publisher name
Piscataway, NJ : IEEE
Source
International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan, S. 83 - 84
ISBN
978-1-4799-1512-5

Method for generating a micromechanical structure

Author(s)
Jung, Denis, Drabe, Christian, Schenk, Harald, Sandner, Thilo, Klose, Thomas, Wolter, Alexander
Type
patent
Year of publication
2013
Patent number
DE 10 2008 013 116

Optical device comprising a structure for avoiding reflections

Author(s)
Sandner, Thilo, Schenk, Harald
Type
patent
Year of publication
2013
Patent number
DE 10 2008 012 810 B4

Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods

Author(s)
Langa, Sergiu, Drabe, Christian, Kunath, Christian, Dreyhaupt, André, Schenk, Harald
Type
Scientific Article not ref.
Year of publication
2013
Publisher name
Bellingham, Wash. : SPIE
Source
SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 86140-1 - 86140-8
ISBN
978-0-8194-9385-9
DOI
http://dx.doi.org/10.1117/12.2003525
Proceedings of SPIE ; 8614

Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera

Author(s)
Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schenk, Harald, Tortschanoff, Andreas
Type
conference publication
Year of publication
2013
Publisher name
Bellingham, Wash. : SPIE
Source
SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 861605-1 - 861605-6
ISBN
978-1-4799-1512-5
Proceedings of SPIE ; 8616

Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications

Author(s)
Jung, Denis, Sandner, Thilo, Kallweit, David, Schenk, Harald
Type
conference publication
Year of publication
2012
Publisher name
Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers
Source
SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-10
ISBN
978-0-8194-8930-2
URL
http://dx.doi.org/10.1117/12.906690
Proceedings of SPIE ; 8252

MOEMS and miniaturized systems XI : San Francisco, California, USA, January 21, 2012

Editor(s)
Schenk, Harald, Piyawattanametha, Wibool, Noell, Wilfried
Type
conference publication
Year of publication
2012
Publisher name
Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers
First page
825203-1
Last page
825210-6
ISBN
978-0-8194-8930-2
Proceedings of SPIE ; 8252

Realization of a hybrid-integrated MEMS scanning grating spectrometer

Author(s)
Pügner, Tino, Knobbe, Jens, Grüger, Heinrich, Schenk, Harald
Type
conference publication
Year of publication
2012
Publisher name
Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers
Source
SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland, S. 83740-1 - 83740-8
URL
http://dx.doi.org/10.1117/12.919068
Proceedings of SPIE ; 8374

Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head

Author(s)
Grahmann, Jan, Wildenhain, Michael, Grashoff, Thomas, Gerwig, Christian, Dallmann, Hans-Georg, Wolter, Alexander, Schenk, Harald
Type
conference publication
Year of publication
2012
Publisher name
Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers
Source
SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 825205-1 - 825205-9
ISBN
978-0-8194-8930-2
URL
http://dx.doi.org/10.1117/12.910671
Proceedings of SPIE ; 8252

Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems

Author(s)
Drabe, Christian, Kallweit, David, Dreyhaupt, Andre, Grahmann, Jan, Schenk, Harald, Davis, Wyatt
Type
conference publication
Year of publication
2012
Publisher name
Bellingham : SPIE Press
Source
SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 825209-1 - 825209-10
ISBN
978-0-8194-8930-2
DOI
http://dx.doi.org/10.1117/12.910203
Proceedings of SPIE ; 8252

Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers

Author(s)
Sandner, Thilo, Grashoff, Thomas, Schenk, Harald, Kenda, Andreas
Type
conference publication
Year of publication
2012
Publisher name
Bellingham : SPIE Press
Source
SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-10
ISBN
978-0-8194-8930-2
DOI
http://dx.doi.org/10.1117/12.909817
Proceedings of SPIE ; 8252

Micro Mirrors

Author(s)
Schenk, Harald, Hornbeck, L. J.
Editor(s)
Waser, Rainer
Type
part of book (chapter)
Year of publication
2012
Publisher name
Weinheim : Wiley-VCH-Verlag
Source
Nanoelectronics and information technology : advanced electronic materials and novel devices, S. 985 - 999
ISBN
978-3-527-40927-3

Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use

Author(s)
Klose, Thomas, Wolter, Alexander, Schenk, Harald
Type
patent
Year of publication
2012
Patent number
DE10 2006 043 388 (10.04.2008)

Mikromechanisches Bauelement mit erhöhter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same

Author(s)
Schenk, Harald, Sandner, Thilo
Type
patent
Year of publication
2012
Patent number
DE 11 2007 003 051

Micromechanical device with tilted electrodes

Author(s)
Schenk, Harald, Sandner, Thilo, Drabe, Christian, Klose, Thomas, Jung, Denis
Type
patent
Year of publication
2012
Patent number
DE 10 2008 012 825

Fluidic Variable Focal length optical Lens and Method of Manufacturing the same

Author(s)
Costache, Florenta Adriana, Schenk, Harald, Bornhorst, K., Schirrmann, Christian
Type
patent
Year of publication
2012
Patent number
DE 11 2010 005 674.9

Optical position feedback for electrostatically driven MOEMS-scanners

Author(s)
Tortschanoff, Andreas, Baumgart, M., Frank, A., Wildenhain, Michael, Sandner, Thilo, Schenk, Harald, Kenda, A.
Type
conference publication
Year of publication
2012
Publisher name
Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers
Source
SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-8
ISBN
978-0-8194-8930-2
URL
http://dx.doi.org/10.1117/12.907761
Proceedings of SPIE ; 8252

This website uses cookies. There are two types of cookies: The first type supports the basic functionality of our website. The second allows us to improve our content for you by saving and analyzing pseudonymised user data. Since this second type is technically not required to run the website, you can withdraw your consent to those cookies at any time. For more information please visit our pages on data protection.

Mandatory

These cookies are needed for a smooth operation of our website.

Statistic

For statistical reasons, we use the platform Matomo to analyse the user flow with the help of website users‘ pseudonymised data. This allows us to optimize website content.

Name Purpose Lifetime Type Provider
_pk_id Used to store a few details about the user such as the unique visitor ID. 13 months HTML Matomo
_pk_ref Used to store the attribution information, the referrer initially used to visit the website. 6 months HTML Matomo
_pk_ses Short lived cookie used to temporarily store data for the visit. 30 minutes HTML Matomo