The chair Micro and Nano Systems focuses on research and development of silicon-based MEMS components and systems based on these components. The content work is carried out in close cooperation with the Fraunhofer Institute for Photonic Microsystems IPMS. State-of-the-art processes for the production of micro and nano-scaled actuators and sensors are available there.
In the summer semester 2020, the lecture "Laboratory and Measurement Technology" will be offered electronically via a video conference platform. The lecture will start on April 15th at 1:45 pm. If you are interested, please contact me beforehand at email@example.com. You will then receive information how to access the platform. You do not need to install any software.