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Module Number:
| 14033
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| Module Title: | Advanced Micro- and Nanoelectronic Devices |
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Moderne Bauelemente der Mikro- und Nanoelektronik
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| Department: |
Faculty 1 - Mathematics, Computer Science, Physics, Electrical Engineering and Information Technology
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| Responsible Staff Member: | -
Prof. Dr. rer. nat. habil. Fischer, Inga Anita
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| Language of Teaching / Examination: | English |
| Duration: | 1 semester |
| Frequency of Offer: |
On special announcement
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| Credits: |
6
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| Learning Outcome: | After successfully completing the module, students are acquainted with background for state-of-art microelectronic technologies and related integration techniques for advanced systems. The students are able to understand relations, dependencies and challenges for the continuous improvement of electronic systems. |
| Contents: | Lectures will address advancements such as More Moore and functional extension of complex semiconductor technologies as well as novel device concepts such as FinFET, multi-bridge-MOS, etc.
- Development/History of semiconductor technologies
- Process background
- MOS device evolution and functionality
- Large scale integration technologies – from Denard scaling towards sub-10nm FET technologies
- Integration methods (monolithic, hybrid, quasi-monolithic)
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| Recommended Prerequisites: | Knowledge of topics of physics at a level corresponding to the first four semesters of a Bachelor’s degree in physics or corresponding to the level of a Bachelor’s degree in electrical engineering. |
| Mandatory Prerequisites: | None |
| Forms of Teaching and Proportion: | -
Lecture
/ 2 Hours per Week per Semester
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Exercise
/ 2 Hours per Week per Semester
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Self organised studies
/ 120 Hours
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| Teaching Materials and Literature: | - Springer Handbook of Semiconductor Devices (2023), Editors: Massimo Rudan, Rossella Brunetti, Susanna Reggiani
Will be specified during the first lecture: textbooks, scientific publications. |
| Module Examination: | Final Module Examination (MAP) |
| Assessment Mode for Module Examination: | |
| Evaluation of Module Examination: | Performance Verification – graded |
| Limited Number of Participants: | None |
| Part of the Study Programme: | -
Master (research-oriented) /
Micro- and Nanoelectronics /
PO 2024
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| Remarks: | - Study programme Micro- and Nanoelectronics M.Sc.: Compulsory elective module in complex „Technology and Devices"
- Study programme Elektrotechnik M.Sc.: Compulsory elective module in complex ?
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| Module Components: | - Lecture: Advanced micro- and nanoelectronic devices for large scale integration
- Accompanying exercise
- Related examination
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| Components to be offered in the Current Semester: | |
