Fabrication

Deposition Set-Ups for Sensors (Airbrush, Spin Coating, Plotting)

Fig. 1.: Coating of quartz microbalances by Air Brush

Fig. 2.: The frequency change can be monitored online during the deposition

Fig. 3.: Spin Coating: Spin Coater MLW T5 with adjustable speed up to 10 000/ min

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