Contents of the lecture

Based on the mode of operation and structure of modern semiconductor components, the lecture teaches the physical and technological fundamentals of manufacturing. An understanding and overview of technological manufacturing processes will enable students to evaluate semiconductor technologies with respect to potential applications in microelectronic circuit design.

• Overview of the development, production and economics of microelectronics
• Fundamentals of semiconductor physics and operating modes of relevant components of integrated circuits
• Production overview of integrated circuits
• Physics and Production of silicon wafers as base material
• Deposition process and production of layer systems
• Doping of semiconductors
  • Epitaxial growth of semiconductor layers
• Structuring of semiconductors
  • Lithography
  • Etching method
  • CMP (Chemical Mechanical Polishing)
• Process control and metrology
• Technology qualification, reliability and yield
• „More than Moore“ – technologies and technology trends
• Assembly and packaging of semiconductors

Part of the lecture takes place as a block course at IHP in Frankfurt (Oder). In addition to the theory, the IHP laboratories provide a practical impression of the content presented within the lectures.  . The date of the block course held at IHP can be arranged in agreement.

Lecture: 2 semester hours per week

Credit points: 3

Time: WS 

During an internship, you will have the opportunity to gain practical experience in the field of semiconductor technology on site at IHP and to deepen what you have learned in the lecture.