Contents of the lecture

The lecture introduces the fundamentals of semiconductor physics, the topology and functionality of key semiconductor devices and semiconductor manufacturing processes to realize integrated silicon-based circuits. An insight into the adjacent fields of material and device diagnostics, manufacturing process control and an overview of technological trends in the semiconductor industry is given. The knowledge gained from this course is a good basis to evaluate given semiconductor technologies with regard to their suitability for application, e.g. in electronic circuits and systems.

• Historical overview of the development of semiconductor technology and semiconductor market
• Semiconductor physics basics
• Basics of integrated semiconductor devices (passives, diode, bipolar transistor, FET)
• Si crystal lattice, crystal growth, wafer production, doping and contamination of wafer material
• Oxidation
• Doping by diffusion and implantation
• Layer deposition and Epitaxial growth of crystalline Si(Ge) layers on the substrate
• Structuring by lithography, etching process
• Cleaning and planarization processes
• Silicon on insulator (SOI)
• Diagnostics, process control & Metrology for Si-based semiconductor processes
• Outlook on future semiconductor technologies
• Excursion to visit semiconductor FAB at IHP-Leibniz Institute for High Performance Microelectronics

Duration: 1 Semester

Offer: Each winter Semester

Lecture: 2 semester hours per week

Prerequisite for exam: Preparation of a study related to a semiconductor topic and successful presentation

Oral exam

Credit points: 6