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Faculty 1
Chair of Semiconductor Technology (joint appointment) Prof. Dr.-Ing. Gerhard Kahmen

Semester Overview

13009Semiconductor TechnologyWiSe 2026 
Wednesday, 14.10.2026 13:45 - 15:15  Introduction into the Semiconductor Technology Lecture

Historical development, production  and economics of microelectronics  		max. 15
persons 		Dr. Y. Yamamoto HG 0.17 
Wednesday, 28.10.202613:45 - 15:15 Fundamentals of semiconductor physics and operation of  key devices of integrated circuitsmax. 15
persons		Prof. Dr. G. KahmenHG 0.17
Wednesday, 04.11.202613:45 - 15:15 Metallization

Lithography		max. 15
persons		Dr. D. Wolansky

P. Kulse		HG 0.17
Wednesday, 11.11.202613:45 - 15:15 Fundamentals of semiconductor physics and operation of  key devices of integrated circuits (cont.)

Physics and Production of silicon base material		max. 15
persons		Prof. Dr. G. KahmenHG 0.17
Wednesday, 18.11.202613:45 - 15:15 Physics and Production of silicon base material (cont.)

Introduction to Silicon planar technology		max. 15
persons		Dr. Y. YamamotoHG 0.17
Wednesday, 25.11.202613:45 - 15:15 Reactive to etching

Chemical mechanical polishing		max. 15
persons		Dr. S. Mehl

A. Adesunkanmi		HG 0.17
Wednesday, 02.12.202613:45 - 15:15 Low Pressure Chemical Vapor Deposition (LP-CVD)

Plasma Enhanced Chemical Vapor Deposition (PE CVD)		max. 15
persons		Dr. Y. YamamotoHG 0.17
Wednesday, 09.12.202613:45 - 15:15 Prozesscontrol / Metrologymax. 15
persons		Dr. O. FursenkoHG 0.17
Wednesday, 16.12.202613:45 - 15:15 Doping

Epitaxy		max. 15
persons		Dr. Y. YamamotoHG 0.17
Wednesday, 06.01.202713:45 - 16:45 Diagnosticmax. 15
persons		Dr. I CostinaHG 0.17
Wednesday, 13.01.202713:45 - 15:15 Yield, reliability, technology qualificationmax. 15
persons		Dr. G. FischerHG 0.17
Wednesday, 20.01.202713:45 - 15:15 Technology trends

MtM technology developments		max. 15
persons		C. MaiHG 0.17
Wednesday, 07.01.202713:45 - 15:15 Excursion to IHP, Frankfurt (Oder)max. 15
persons		Prof. Dr. G. Kahmen

(Dr. Y. Yamamoto)		IHP

For further information please contact Prof. Dr. G. Kahmen.