BTU overview
Faculty 1
Chair of Semiconductor Technology (joint appointment) Prof. Dr.-Ing. Gerhard Kahmen

Semester Overview

14442LectureSemiconductor Technology
Wednesday, 15.10.202513:45 - 15:15 Introduction into the Semiconductor Technology Lecture 
Historical development, production  and economics of microelectronics 		max. 15
persons		Prof. Dr. A. MaiHG 0.20
Wednesday, 22.10.202513:45 - 15:15 Fundamentals of semiconductor physics and operation of  key devices of integrated circuitsmax. 15
persons		Prof. Dr. G. KahmenHG 0.20
Wednesday, 29.10.202513:45 - 15:15 Reactive io etching
Metallization		max. 15
persons		Dr. S. Marschmeyer
Dr. D. Wolansky		HG 0.20
Wednesday, 05.11.202513:45 - 15:15 Physics and Production of silicon base material (cont.)
Introduction to Silicon planar technology		max. 15
persons		Prof. Dr. G. KahmenHG 0.20
Wednesday, 12.11.202513:45 - 15:15 Fundamentals of semiconductor physics and operation of  key devices of integrated circuits (cont.)
Physics and Production of silicon base material		max. 15
persons		Prof. Dr. G. KahmenHG 0.20
Wednesday, 19.11.202513:45 - 15:15 Chemical mechanical polishing
Lithography		max. 15
persons		A. Adesunkanmi
P. Kulse		HG 0.20
Wednesday, 26.11.202513:45 - 15:15 Low Pressure Chemical Vapor Deposition (LP-CVD)
Plasma Enhanced Chemical Vapor Deposition (PE CVD)		max. 15
persons		Dr. Y. YamamotoHG 0.20
Wednesday, 03.12.202513:45 - 15:15 Prozesscontrol / Metrologymax. 15
persons		Dr. O. FursenkoHG 0.20
Wednesday, 10.12.202513:45 - 15:15 Doping
Epitaxy		max. 15
persons		Dr. Y. YamamotoHG 0.20
Wednesday, 17.12.202513:45 - 15:15 Diagnosticmax. 15
persons		Dr. I. CostinaHG 0.20
Wednesday, 07.01.202613:45 - 15:15 Yield, reliability, technology qualification max. 15
persons		Dr. G. FischerHG 0.20
Wednesday, 14.01.202613:45 - 15:15 Technology trends
MtM technology developments (at IHP)		max. 15
persons		Prof. Dr. A. MaiHG 0.20
Wednesday, 21.01.202613:45 - 15:15 Excursion to IHP, Frankfurt (Oder)max. 15
persons		Prof. Dr. G. Kahmen
Dr. Y. Yamamoto		IHP

For further information please contact Prof. Dr. G. Kahmen.