BTU overview
Faculty 1
Chair of Semiconductor Technology (joint appointment) Prof. Dr.-Ing. Gerhard Kahmen

Semester Overview

112210LectureSemiconductor Technology, formerly Halbleitertechnologie
Wednesday, 16.10.202413:45 - 15:15 Introduction into the Semoconductor Technology Lecture
Historical development, production  and economics of microelectronics 		max. 16 personsDr. Y. Yamamoto
Dr. Y. Yamamoto		LG1A/121
Wednesday, 23.10.202413:45 - 15:15 Fundamentals of semiconductor physics and operation of  key devices of integrated circuitsmax. 16 personsProf. Dr. G. KahmenLG1A/121
Wednesday, 30.10.202413:45 - 15:15 Fundamentals of semiconductor physics and operation of  key devices of integrated circuits (cont.)
Physics and Production of silicon base material		max. 16 personsProf. Dr. G. Kahmen
Prof. Dr. G. Kahmen		LG1A/121
Wednesday, 06.11.202413:45 - 15:15 Physics and Production of silicon base material (cont.)
Introduction to Silicon planar technology		max. 16 personsProf. Dr. G. Kahmen
Prof. Dr. G. Kahmen		LG1A/121
Wednesday, 13.11.202413:45 - 15:15 Low Pressure Chemical Vapor Deposition (LP-CVD)
Plasma Enhanced Chemical Vapor Deposition (PE CVD)		max. 16 personsDr. Y. Yamamoto
Dr. Y. Yamamoto		LG1A/121
Wednesday, 20.11.202413:45 - 15:15 Doping
Epitaxy		max. 16 personsDr. Y. Yamamoto
Dr. Y. Yamamoto		LG1A/121
Wednesday, 27.11.202413:45 - 15:15 Cemical mechanical polishing
Lithography		max. 16 personsA. Adesunkanmi
P. Kulse		LG1A/121
Wednesday, 04.12.202413:45 - 15:15 Reactive io etching
Metallization		max. 16 personsDr. S. Marschmeyer
Dr. D. Wolansky		LG1A/121
Wednesday, 11.12.202413:45 - 15:15 Prozesscontrol / Metrologymax. 16 personsDr. O. FursenkoLG1A/121
Wednesday, 18.12.202413:45 - 15:15 Diagnosticmax. 16 personsDr. I. CostinaLG1A/121
Wednesday, 08.01.202513:45 - 15:15 Yield, reliability, technology qualification max. 16 personsDr. G. FischerLG1A/121
Wednesday, 15.01.202513:45 - 15:15 Technology trends
MtM technology developments (am IHP)		max. 16 personsProf. Dr. A. Mai
Prof. Dr. A. Mai​​		LG1A/121
Wednesday, 22.01.202513:45 - 15:15Virtual manufacturing of a SiGe BiCMOS ASIC
Exkursion to IHP		max. 16 personsDr. Y. Yamamoto
t.b.d.		IHP

Further information can be obtained directly from  Herrn Prof. G. Kahmen.