13009 - Semiconductor Technology Modulübersicht

Module Number: 13009
Module Title:Semiconductor Technology
  Halbleitertechnologie
Department: Faculty 1 - Mathematics, Computer Science, Physics, Electrical Engineering and Information Technology
Responsible Staff Member:
  • Prof. Dr.-Ing. Kahmen, Gerhard
Language of Teaching / Examination:English
Duration:1 semester
Frequency of Offer: Every winter semester
Credits: 6
Learning Outcome:After successfully completing the module, students have learned the basics of semiconductor processing technologies and have gained background of relating physical and technological processes. They are able to comprehend the technological manufacturing process of modern semiconductor devices based on their operating principles physical structure.
Contents:The overview of the manufacturing processes and the technological-physical correlations enables the students to evaluate semiconductor technologies with regard to their suitability for application, e.g. in electronic circuits.
  • Historical overview of the development of semiconductor technology and semiconductor market
  • Semiconductor physics basics
  • Basics of integrated semiconductor devices (passives, diode, bipolartransistor, FET)
  • Si crystal lattice, crystal growth, wafer production, doping and contamination of wafer material
  • Oxidation
  • Doping by diffusion and implantation
  • Epitaxial growth of crystalline Si(Ge) layers on the substrate
  • Structuring by lithography, etching process
  • Cleaning and planarization processes
  • Silicon on insulator (SOI)
  • Outlook on future semiconductor technologies
The exercise offered in addition to the lecture enables the students to deepen and apply the acquired knowledge through concrete and current tasks from semiconductor technology. In this context, teamwork is taught and insights into the working methods of a leading research institute are given.
Recommended Prerequisites:
  • Knowledge of semiconductor physics based on the bachelor degree in physics, in particular knowledge of the content of module 11868: Allgemeine Physik IV (Festkörperphysik)
  • Knowledge of the functioning and structure of electronic components, such as knowledge of the content of module 12364: Elektronische Bauelemente und Grundschaltungen
Mandatory Prerequisites:None
Forms of Teaching and Proportion:
  • Lecture / 2 Hours per Week per Semester
  • Exercise / 2 Hours per Week per Semester
  • Self organised studies / 120 Hours
Teaching Materials and Literature:Will be announced in the first lecture.
Module Examination:Prerequisite + Final Module Examination (MAP)
Assessment Mode for Module Examination:Prerequisite:
  • Successful presentation of seminar paper
Final module examination:
  • Oral examination, 30-45 min.
Evaluation of Module Examination:Performance Verification – graded
Limited Number of Participants:None
Part of the Study Programme:
  • Master (research-oriented) / Elektrotechnik / PO 2019 - 1. SÄ 2020
  • Master (research-oriented) / Informatik / PO 2008 - 2. SÄ 2017
  • Master (research-oriented) / Informations- und Medientechnik / PO 2017
  • Master (research-oriented) / Künstliche Intelligenz Technologie / PO 2022
  • Master (research-oriented) / Physics / PO 2021
  • Bachelor (research-oriented) / Physik / PO 2017
Remarks:
  • Study programme Physics M.Sc.: Compulsory elective module in complex „Physical Specialization with Experimental Focus“, topic area „Nanophysics“
  • Study programme Elektrotechnik M.Sc.: Compulsory elective module in complex „Electrical Engineering“ in the diciplines „Informationstechnik“ and „Automatisierungstechnik“
  • Study programme Informatik M.Sc.: Compulsory elective module in minor „Maschinenbau/Elektrotechnik“
  • Study programme Informations- und Medientechnik M.Sc.: Compulsory elective module in „Zuverlässige HW/SW-Systeme“
Module Components:
  • Lecture Semiconductor Technology:
    The lecture will partly take place as a block event during the lecture free period at IHP in Frankfurt (Oder).
  • Exercise Semiconductor Technology in context of lecture:
    The exercise will take place as a block event during the lecture free period at IHP in Frankfurt (Oder).
  • Related examination
Components to be offered in the Current Semester:
Phase-out Module: Follow-up Module since: 21.01.2020