13019 - Micro Systems Modulübersicht

Module Number: 13019
Module Title:Micro Systems
Department: Faculty 1 - Mathematics, Computer Science, Physics, Electrical Engineering and Information Technology
Responsible Staff Member:
  • Prof. Dr.-Ing. Dr. rer. nat. habil. Schenk, Harald
Language of Teaching / Examination:English
Duration:1 semester
Frequency of Offer: Every winter semester
Credits: 6
Learning Outcome:After successful completion of the module, the students master the basics of silicon-based microsystems technology. Using the module's topic as an example, they understand the methods of gaining knowledge and know exemplary applications.
In addition, social competences such as the ability to cooperate, as well as other individual competences such as diligence, perseverance, curiosity, initiative, frustration tolerance, etc. were promoted in the students.
  • Introduction to silicon technology:
    materials, film deposition and structuring, surface- and volume-micromechanics, overview of equipment technology.
  • Physical principles of efficiency:
    basic physical principles of efficiency of simple sensors and actors (e.g. electrostatic, piezoelectric and magnetic effects).
  • Proposal of complex sensors and actors:
    overview of systematics and methodology, simple simulation examples for the calculation of dynamic properties of MEMS sensors.
  • Function and properties of complex sensors and actors:
    e.g. light modulators, acceleration sensors, gyroscope, scanner mirror.
Recommended Prerequisites:
  • Sound knowledge of solid state physics at or beyond the bachelor level.
Mandatory Prerequisites:None
Forms of Teaching and Proportion:
  • Lecture / 2 Hours per Week per Semester
  • Exercise / 1 Hours per Week per Semester
  • Self organised studies / 135 Hours
Teaching Materials and Literature:
  • M. Madou, "Fundamentals of Microfabrication„, CRC Press , Boca Raton-NewYork (2002)
  • Gianchandani, Yogesh B.; Tabata, Osamu; Zappe, Hans P.: „Comprehensive Microsystems“, Vol. 1-3, Elsevier, Amsterdam (2008)
A detailed bibliography will be provided in the first lecture.
Module Examination:Prerequisite + Final Module Examination (MAP)
Assessment Mode for Module Examination:Prerequisite:
  • Successful seminar talk (with written part)
Final module examination:
  • Oral examination, 30-45 min
Evaluation of Module Examination:Performance Verification – graded
Limited Number of Participants:None
Part of the Study Programme:
  • Master (research-oriented) / Elektrotechnik / PO 2014
  • Master (research-oriented) / Elektrotechnik / PO 2019
  • Master (research-oriented) / Elektrotechnik / PO 2023
  • Master (research-oriented) / Micro- and Nanoelectronics / PO 2024
  • Master (research-oriented) / Physics / PO 2021
  • Study programme Physics M.Sc.: Compulsory elective module in complex „Physical Specialization with Experimental Focus“, topic area „Nanophysics“
Self-organized studies are composed of:
  • reworking of lecture
  • literature work
  • preparation of a talk
Module Components:
  • Lecture: Micro Systems
  • Accompanying exercise
  • Related examination
Components to be offered in the Current Semester:
  • no assignment