13752 - Advanced Micro Systems, Focus on Microsensors Modulübersicht

Module Number: 13752
Module Title:Advanced Micro Systems, Focus on Microsensors
  Fortgeschrittene Mikrosystemtechnik, Schwerpunkt auf Mikrosensoren
Department: Faculty 1 - Mathematics, Computer Science, Physics, Electrical Engineering and Information Technology
Responsible Staff Member:
  • Prof. Dr.-Ing. Dr. rer. nat. habil. Schenk, Harald
Language of Teaching / Examination:English
Duration:1 semester
Frequency of Offer: Every summer semester
Credits: 6
Learning Outcome:After successful completion of the module, students have in-depth knowledge in the field of silicon-based microsystems technology, especially in the area of microsensor technology. They are able to analyze problems in this field and to develop solutions to problems,
In addition, social competencies such as the ability to cooperate, as well as other individual competencies such as diligence, perseverance, curiosity, initiative, frustration tolerance, etc. were promoted in the students.
  • Differentiation of sensors, transducers, actuators
  • Classification of sensors according to operating principles and intended use
  • Characteristics of sensors such as linearity, hysteresis, resolution
  • Analogue and digital sensors From elementary sensors to signal processing
  • Design, mode of operation and properties of selected capacitive, optical, chemical, acoustic and ultrasonic sensors
  • Application areas of sensors
  • Signal conditioning
  • Current research activities in microsensor technology
  • Principles and examples of microactuators and microtransducers
Recommended Prerequisites:
  • Sound knowledge of solid state physics at or beyond the bachelor level
  • Knowledge of the topics of module 13019 Micro Systems
Mandatory Prerequisites:None
Forms of Teaching and Proportion:
  • Lecture / 2 Hours per Week per Semester
  • Seminar / 1 Hours per Week per Semester
  • Self organised studies / 135 Hours
Teaching Materials and Literature:
  • M. Madou, "Fundamentals of Microfabrication„, CRC Press , Boca Raton-NewYork (2002)
  • Gianchandani, Yogesh B.; Tabata, Osamu; Zappe, Hans P.: „Comprehensive Microsystems“, Vol. 1-3, Elsevier, Amsterdam (2008)
A detailed bibliography will be provided in the first lecture.
Module Examination:Prerequisite + Final Module Examination (MAP)
Assessment Mode for Module Examination:Prerequisite:
  • Successful seminar talk (with written part)
Final module examination:
  • Oral examination, 30-45 min
Evaluation of Module Examination:Performance Verification – graded
Limited Number of Participants:None
Part of the Study Programme:
  • Abschluss im Ausland / Elektrotechnik / keine PO
  • Master (research-oriented) / Elektrotechnik / PO 2014
  • Master (research-oriented) / Elektrotechnik / PO 2019
  • Master (research-oriented) / Elektrotechnik / PO 2023
  • Master (research-oriented) / Micro- and Nanoelectronics / PO 2024
  • Master (research-oriented) / Physics / PO 2021
  • Study programme Physics M.Sc.: Compulsory elective module in complex „Physical Specialization with Experimental Focus“, topic area „Nanophysics“
Self-organized studies are composed of:
  • reworking of lecture
  • literature work
  • preparation of a talk
Module Components:
  • Lecture: Advanced Micro Systems, Focus on Microsensors
  • Accompanying exercise
  • Related examination
Components to be offered in the Current Semester: