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Module Number:
| 13752
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| Module Title: | Advanced Micro Systems, Focus on Microsensors |
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Fortgeschrittene Mikrosystemtechnik, Schwerpunkt auf Mikrosensoren
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| Department: |
Faculty 1 - Mathematics, Computer Science, Physics, Electrical Engineering and Information Technology
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| Responsible Staff Member: | -
Prof. Dr.-Ing. habil. Ruffert, Christine
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| Language of Teaching / Examination: | English |
| Duration: | 1 semester |
| Frequency of Offer: |
Every summer semester
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| Credits: |
6
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| Learning Outcome: | After successful completion of the module, students have in-depth knowledge in the field of silicon-based microsystems technology, especially in the area of microsensor technology. They are able to analyze problems in this field and to develop solutions to problems,
In addition, social competencies such as the ability to cooperate, as well as other individual competencies such as diligence, perseverance, curiosity, initiative, frustration tolerance, etc. were promoted in the students. |
| Contents: | - Differentiation of sensors, transducers, actuators
- Classification of sensors according to operating principles and intended use
- Characteristics of sensors such as linearity, hysteresis, resolution
- Analogue and digital sensors From elementary sensors to signal processing
- Design, mode of operation and properties of selected capacitive, optical, chemical, acoustic and ultrasonic sensors
- Application areas of sensors
- Signal conditioning
- Current research activities in microsensor technology
- Principles and examples of microactuators and microtransducers
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| Recommended Prerequisites: | - Sound knowledge of solid state physics at or beyond the bachelor level
- Knowledge of the topics of module 13019 Micro Systems
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| Mandatory Prerequisites: | None |
| Forms of Teaching and Proportion: | -
Lecture
/ 2 Hours per Week per Semester
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Seminar
/ 1 Hours per Week per Semester
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Self organised studies
/ 135 Hours
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| Teaching Materials and Literature: | - M. Madou, "Fundamentals of Microfabrication„, CRC Press , Boca Raton-NewYork (2002)
- Gianchandani, Yogesh B.; Tabata, Osamu; Zappe, Hans P.: „Comprehensive Microsystems“, Vol. 1-3, Elsevier, Amsterdam (2008)
A detailed bibliography will be provided in the first lecture. |
| Module Examination: | Prerequisite + Final Module Examination (MAP) |
| Assessment Mode for Module Examination: | Prerequisite:
- Successful seminar talk (with written part)
Final module examination:
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| Evaluation of Module Examination: | Performance Verification – graded |
| Limited Number of Participants: | None |
| Part of the Study Programme: | -
Abschluss im Ausland /
Elektrotechnik /
keine PO
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Master (research-oriented) /
Elektrotechnik /
PO 2014
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Master (research-oriented) /
Elektrotechnik /
PO 2019
- 1. SÄ 2020
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Master (research-oriented) /
Elektrotechnik /
PO 2023
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Master (research-oriented) /
Micro- and Nanoelectronics /
PO 2024
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Master (research-oriented) /
Physics /
PO 2021
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| Remarks: | - Study programme Physics M.Sc.: Compulsory elective module in complex „Physical Specialization with Experimental Focus“, topic area „Nanophysics“
- Study programme Micro- and Nanoelectronics M.Sc.: Compulsory elective module in complex „Technology and Devices“
Self-organized studies are composed of:
- reworking of lecture
- literature work
- preparation of a talk
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| Module Components: | - Lecture: Advanced Micro Systems, Focus on Microsensors
- Accompanying exercise
- Related examination
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| Components to be offered in the Current Semester: | |
