13456 - Physics and Technology of Semiconductor Devices Modulübersicht

Module Number: 13456 - module is no longer offered from WS 2018/19
Module Title:Physics and Technology of Semiconductor Devices
  Physik und Technologie von Halbleiterbauelementen
Department: Faculty 1 - Mathematics, Computer Science, Physics, Electrical Engineering and Information Technology
Responsible Staff Member:
  • Prof. Dr. rer. nat. habil. Schmeißer, Dieter
Language of Teaching / Examination:English
Duration:1 semester
Frequency of Offer: Every summer semester
Credits: 4
Learning Outcome:Students acquire basic knowledge in the physics and fabrication techniques of state-of-the-art semiconductor nano- and microelectronic devices.The topic of the module serves as an example to illustrate the connection between basic and applied science andto demonstrate the methods of attaining new perceptions. Additionally the module supports presentation skills and further competences as accurateness, endurance, and curiosity.
Contents:The focus of the course is on advanced silicon technology and on new device concepts. The following topics are covered:
  • Overview on silicon fabrication techniques
  • Nanometer-scale CMOS devices and technologies
  • CMOS performance factors and device design
  • Active and passive devices for radio-frequency application
  • Performance factors and device design of bipolar transistors
  • Semiconductor memory concepts
  • Optoelectronic semiconductor devices
Recommended Prerequisites:Fundamental knowledge in solid state physics corresponding to a bachelor degree in physics or electrical engineering.
Mandatory Prerequisites:None
Forms of Teaching and Proportion:
  • Lecture / 2 Hours per Week per Semester
  • Self organised studies / 90 Hours
Teaching Materials and Literature:
  • Y. Taur, T.H. Ning, Fundamentals of modern VLSI devices, Cambridge University Press, 1998
  • S.M. Sze, Physics of semiconductor devices, John Wiley & Sons, New York, 1981
  • M. Quirk, J. Serda, Semiconductor Manufacturing Technology, Prentice Hall Inc., 2001
A detailed list of references will be provided at the beginning of the course
Module Examination:Prerequisite + Final Module Examination (MAP)
Assessment Mode for Module Examination:Prerequisite:
  • Successful oral presentation in the course
Final module examination:
  • Oral examination, 30-45 min.
Evaluation of Module Examination:Performance Verification – graded
Limited Number of Participants:None
Part of the Study Programme:
  • no assignment
Remarks:Lecture is given by PD Dr. Holger Rücker.
  • Study programme Physics M. Sc.: Compulsory elective module for area "A: Applied Physics".
Module Components:Lecture Physics and technology of semiconductor devices - hpw
Components to be offered in the Current Semester:
  • no assignment
Follow-up Module/s: Phase-out module since: 02.07.2018
  • without Follow-up Module/s