Name:
Fraunhofer project group Mesoscopic actuators and systems (MESYS) at BTU Cottbus-Senftenberg
 
Funding:
This project is financially supported by the Ministry of Science, Research and Culture (MWFK) and BTU Cottbus-Senftenberg.

Motivation:
Micro actuators and sensors are the basis for miniaturized, intelligent and networked systems. Hardly a high-growth technical area comes without microsystem technology components in the form of sensors or actuators. Micro actuators represent 38 % of the total MEMS market volume. The actuators are used, among other things, in micro-mirrors for projectors and displays, in print heads (ink-jet), thin-film acoustic resonators (FBARs), high-frequency filters and silicon clocks. In order to meet the increasing demands on the performance of micromechanical components and to extend the technical basis for new applications, further miniaturization is essential. Miniaturization as part of a technological evolution also means that new material principles are necessary for micro- and nanomechanical systems. The aim of the MESYS project group is to develop a completely new type of high-performance electrostatic bending actuators and to test the new technology in various fields of application. 

Approach:
Using electrostatic actuators, plates or beams are moved and used to deflect light beams, move fluids or generate ultrasound. Contrary to conventional electrostatic actuators, which allow fundamental deflections only in conjunction with large actuator dimensions and high energy consumption, the researchers develop a new class of electrostatic bending actuators with an extremely compact design and simultaneously large deflections without hysteresis by means of a suitable lever principle. These new actuators are manufactured using conventional silicon manufacturing processes and can be integrated directly into semiconductor components and CMOS circuits, thus offering the potential for cost-effective volume production.

Details:
The Fraunhofer Project Group Mesoscopic Actuators and Systems (MESYS) belongs to the Fraunhofer Institute for Photonic Microsystems IPMS in Dresden, Saxony and focuses on the development of CMOS-compatible production processes, the simulation and the characterization of the novel mesoscopic actuators. The investigation of the mesoscopic effects is a central topic of the research work.

Aim:
In addition to the development of a new, high-performance actuator class for micro- and nanosystem technology, the integration of selected actuators for the realization of innovative components, systems and applications and therefore the technology’s validation are further goals. The range of applications extends from optics, measurement technology and medical technology to biotechnology and communication technology. Applications in the field of optics are, for example, high-precision positioning drives of micro-tilt mirrors or lens systems for laser beam deflection, in pico projectors, 3D endoscopes or microscopic applications. The new actuators are also suitable as optical switches or for the highly precise positioning of optical waveguides. In addition to optics, MESYS also focuses on a variety of other applications: in medical technology as micro pumps and valves in microfluidic systems or implantable insulin pumps, or as miniaturized loudspeakers for hearing aids, smartphones and wearables, which, in contrast to existing micromechanical loudspeakers, while offering an extremely compact design.

Project duration: 10/01/2012 – 09/30/2017