IMPORTANT: Due to the corona pandemic, the lectures of the department will probably not take place in one-site attendance. Interested students shall contact Prof. Schenk by email.


The chair Micro and Nano Systems focuses on research and development of silicon-based MEMS components and systems based on these components.


The content work is carried out in close cooperation with the Fraunhofer Institute for Photonic Microsystems IPMS. State-of-the-art processes for the production of micro and nano-scaled actuators and sensors are available there.

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