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Robust variance estimators in application to segmentation of measurement data distorted by impulsive and non-Gaussian noise Author(s) Witulska, Justyna, Zaleska, Anna, Kremzer-Osiadacz, Natalia, Wyłomańska, Agnieszka, Jabłoński, Ireneusz Type Scientific Article ref. Year of publication 2025 Publisher name Elsevier BV Source Measurement Volume 239 ISSN 0263-2241 DOI https://doi.org/10.1016/j.measurement.2024.115472
Highly integrable silicon micropumps using lateral electrostatic bending actuators Author(s) Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Ruffert, Christine, Jongmanns, Marcel, Schenk, Harald Type Scientific Article ref. Year of publication 2024 Publisher name Springer Science and Business Media LLC Source Microsystem Technologies, S. 949 - 960 Volume 30 Issue/Journal number 8 ISSN 0946-7076 DOI https://doi.org/10.1007/s00542-024-05635-w
Rapid characterisation of mixtures of hydrogen and natural gas by means of ultrasonic time-delay estimation Author(s) Ruffert, Christine, Monsalve Guaracao, Jorge Mario, Völz, Uwe, Jongmanns, Marcel, Betz, Björn, Langa, Sergiu, Amelung, Jörg, Wiersig, Marcus Type Scientific Article ref. Year of publication 2024 Source Journal of Sensors and Sensor Systems, S. 185 Volume 13 Issue/Journal number 2 ISSN 2194-878X DOI https://doi.org/10.5194/jsss-13-179-2024
Design and characterization of a silicon MEMS microvalve for proportional flow control based on electrostatic bending actuators Author(s) Ruffert, Christine, Jongmanns, Marcel, Kaiser, Bert, Langa, Sergiu Type Conference Proceeding refering Year of publication 2024 Source Microsystem Technologies DOI https://doi.org/10.1007/s00542-024-05684-1
Temporal and multivariate similarity clustering of 5G performance data Author(s) Mazguła, Jakub, Król, Dariusz, Jabłoński, Ireneusz Type Scientific Article ref. Year of publication 2024 Publisher name Institute of Electrical and Electronics Engineers (IEEE) Source IEEE Access, S. 114137 - 114145 Volume 12 ISSN 2169-3536 DOI https://doi.org/10.1109/ACCESS.2024.3444704
Artificial intelligence for the calibration of mobile spectral analyzers Author(s) Jabłoński, Ireneusz, Grüger, Heinrich, Augel, Lion, Knobbe, Jens Type Conference Proceeding refering Year of publication 2024 Source Energieautonome Sensorsysteme 2024, 12. GMM-Fachtagung, 19. – 20. März 2024, Freiburg, S. 70 - 72 ISBN 978-3-8007-6298-9 978-3-8007-6299-6 URL https://www.vde-verlag.de/books/456298/gmm-fb-109-eass-2024.html GMM-Fachbericht ; 109
Silicon integrated electrostatic drives Author(s) Schenk, Harald Type Conference Proceeding no refering Year of publication 2024 Source International Conference and Exhibition on New Actuator Systems and Applications 2024 DOI https://doi.org/10.24406/publica-3964
Digitalisierung und KI für Gesellschaft, Wirtschaft und Forschung Author(s) Schenk, Harald Editor(s) Schenk, Harald Type Scientific Article not ref. Year of publication 2024 Source Digitalisierung und KI für Gesellschaft, Wirtschaft und Forschung DOI https://doi.org/10.24406/publica-3965
Highly integrated active Spatial Light Modulators - from imaging to holography Author(s) Schenk, Harald Type Conference Proceeding no refering Year of publication 2024 Source International Conference on Machine Vision 2024 DOI https://doi.org/10.24406/publica-3963
P31 - Optimization of Harmonic Distortions for Electrostatic MEMS Push-Pull NED-Microspeakers Author(s) Wall, F., Schenk, H., Schenk, H., Melnikov, A., Ehrig, L., Kaiser, B. Type Conference Proceeding refering Year of publication 2024 Publisher name AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany Source iCCC2024 - iCampµs Cottbus Conference 2024-05-14 - 2024-05-16 Cottbus : Poster, S. 218 - 221 ISBN 978-3-910600-00-3 DOI https://doi.org/10.5162/iCCC2024/P31
Design of micromachines under uncertainty with the sample-average approximation method Author(s) Guaraco, Jorge Mario Monsalve, Langa, Sergiu, Stolz, Michael, Mrosk, Andreas, Kaiser, Bert, Schenk, Harald Type Scientific Article ref. Year of publication 2024 Publisher name Japan Society of Mechanical Engineers Source Journal of Advanced Mechanical Design, Systems, and Manufacturing Volume 18 (2024) Issue/Journal number 2 ISSN 1881-3054 DOI https://doi.org/10.1299/jamdsm.2024jamdsm0018
Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections Author(s) Villasmunta, Francesco, Steglich, Patrick, Villringer, Claus, Schrader, Sigurd, Schenk, Harald, Mai, Andreas, Regehly, Martin Editor(s) Schröder, Henning, Chen, Ray T. Type Scientific Article ref. Year of publication 2024 Publisher name SPIE Source Optical Interconnects XXIV DOI https://doi.org/10.1117/12.3003146
Noise-Robust Machine Learning Models for Predictive Maintenance Applications Author(s) Suawa Fogou, Priscile, Halbinger, Anja, Jongmanns, Marcel, Reichenbach, Marc Type Conference Proceeding refering Year of publication 2023 Accelerometer Source IEEE Sensors Journal, S. 15081 - 15092 URL https://ieeexplore.ieee.org/document/10122864 DOI https://doi.org/10.1109/JSEN.2023.3273458
The ForTune Toolbox: Building Solutions for Condition-Based and Predictive Maintenance Focusing on Retrofitting Author(s) Assafo, Maryam, Lautsch, Martin, Suawa, Priscile Fogou, Jongmanns, Marcel, Hübner, Michael, Reichenbach, Marc, Brockmann, Carsten, Reinhardt, Denis, Langendörfer, Peter Type image Year of publication 2023 Publisher name Berlin : VDE Verlag ISBN 978-3-8007-6204-0 978-3-8007-6203-3
Elektrostatischer Gegentakt NED-Aktor für Im-Ohr-µLautsprecher Author(s) Ruffert, Christine, Schenk, Hermann A. G., Kaiser, Bert, Ehrig, Lutz, Monsalve Guaracao, Jorge Mario, Langa, Sergiu, Wall, Franziska, Melnikov, Anton, Stolz, Michael, Morsk, Andreas, Schuffenhauer, David, Conrad, Holger, Schenk, Harald Type image Year of publication 2023 URL https://publica.fraunhofer.de/entities/publication/af8b72ee-2b53-4478-a964-a9dfb17ac3ad/details DOI https://doi.org/10.24406/publica-2553
A non-destructive electro-acoustic method to characterize the pull-in voltage of electrostatic actuators Author(s) Wall, Franziska, Schenk, Hermann A. G., Melnikov, Anton, Kaiser, Bert, Schenk, Harald Type Scientific Article ref. Year of publication 2023 Pull-in; Electrostatic actuator; Microspeaker; Harmonic distortions Source Nonlinear Dynamics, S. 17809 - 17818 Volume 111 Issue/Journal number 19 ISSN 1573-269X 0924-090X URL https://link.springer.com/article/10.1007/s11071-023-08811-1 DOI https://doi.org/10.1007/s11071-023-08811-1
Ion-sensitive structure and method for producing the same Author(s) Kurth, Eberhard, Kunath, Christian, Schenk, Harald Type patent Year of publication 2023 Patent number DE 10 2015 204 921 URL https://register.dpma.de/DPMAregister/pat/register?AKZ=1020152049213
MEMS transducer for interacting with a volume flow of a fluid, and method for producing the same Author(s) Schenk, Harald, Conrad, Holger Type patent Year of publication 2023 Patent number US 11,554,950 URL https://www.freepatentsonline.com/11554950.html
Design of Micromachined Ultrasonic Transducers for Variability with the Sample-Average Approximation Method Author(s) Monsalve Guaracao, Jorge Mario, Kaiser, Bert, Schenk, Harald Type Conference Proceeding refering Year of publication 2023 Publisher name Berlin : VDE Verlag Source Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023, S. 639 ISBN 978-3-8007-6204-0 978-3-8007-6203-3
Optical Through-Silicon Waveguides for 3D-Chip-Interconnections Author(s) Villasmunta, Francesco, Steglich, Patrick, Heinrich, Friedhelm, Villringer, Claus, Mai, Andreas, Schrader, Sigurd, Schenk, Harald Type image Year of publication 2023 Integrated Optics; Micro Optics; Optical Information Transmission URL https://www.dgao-proceedings.de/abstract/abstract_only.php?id=2920
Implementation of a hand gesture recognition using ultrasound measurements on a NVIDIA Jetson platform with AI-based evaluation Author(s) Jongmanns, Marcel Type image Year of publication 2023 Publisher name VDE Verlag : Berlin ISBN 978-3-8007-6204-0 978-3-8007-6203-3
Micromechanical devices with mechanical actuators Author(s) Conrad, Holger, Gaudet, Matthieu, Schenk, Harald, Uhlig, Sebastian Type patent Year of publication 2023 Patent number US 11,639,718 URL https://www.freepatentsonline.com/11639718.html
Vorrichtung und Verfahren zur Absorption von elektromagnetischer Strahlung, System zur Verwendung in einem Bildsensor, sowie Verfahren zur Herstellung einer Vorrichtung zur Absorption von elektromagnetischer Strahlung Author(s) Augel, Lion, Knobbe, Jens Type patent Year of publication 2023 Patent number DE 10 2021 213 747 URL https://register.dpma.de/DPMAregister/pat/register?AKZ=1020212137474
Vorrichtung, Verfahren und System zur Absorption von elektromagnetischer Strahlung, sowie Verfahren zur Herstellung einer Vorrichtung zur Absorption von elektromagnetischer Strahlung Author(s) Augel, Lion, Knobbe, Jens Type patent Year of publication 2023 Patent number DE 10 2021 213 746 URL https://register.dpma.de/DPMAregister/pat/register?AKZ=1020212137466
Characterization of AlSiCu/TiN/p-Si Schottky Contacts with Nanophotonic Structures for Near-infrared Photodetectors Author(s) Wen, Hanying, Augel, Lion, Wang, Wenjuan, Knobbe, Jens Type Conference Proceeding refering Year of publication 2023 Publisher name Piscataway, NJ : IEEE Source 2023 46th International Spring Seminar on Electronics Technology (ISSE) : 10-14 May 2023 : conference location: Timișoara, Romania, S. 1 - 5 ISBN 979-8-3503-3485-2 979-8-3503-3484-5 URL https://ieeexplore.ieee.org/document/10168510 DOI https://doi.org/10.1109/ISSE57496.2023.10168510
TiN-Si Schottky Diodes for SWIR Detection Author(s) Augel, Lion, Wen, Hanying, Knobbe, Jens Type Conference Proceeding refering Year of publication 2023 Publisher name Berlin : VDE Verlag Source Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023, S. 30 - 34 ISBN 978-3-8007-6204-0 978-3-8007-6203-3
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers Author(s) Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve Guaracao, Jorge Mario, Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald Type Scientific Article ref. Year of publication 2022 Source Microsystems & Nanoengineering Volume Vol. 8 ISSN 2055-7434 DOI https://doi.org/10.1038/s41378-022-00458-z
Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation Author(s) Schweiger, Severin, Schulze, Tim F., Schlipf, Simon, Reinig, Peter, Schenk, Harald Type Scientific Article ref. Year of publication 2022 Source Journal of Optical Microsystems Volume Vol. 2 Issue/Journal number 3 ISSN 2708-5260 DOI https://doi.org/10.1117/1.jom.2.3.033501
Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion Author(s) Monsalve Guaracao, Jorge Mario, Melnikov, Anton, Stolz, Michael, Mrosk, Andreas, Jongmanns, Marcel, Wall, Franziska, Langa, Sergiu, Marica-Bercu, Ioana, Brändel, Tim, Kircher, Marco, Schenk, Hermann A. G., Kaiser, Bert, Schenk, Harald Type Scientific Article ref. Year of publication 2022 Source Sensors and Actuators A: Physical Volume Vol. 345 ISSN 1873-3069 0924-4247 DOI https://doi.org/10.1016/j.sna.2022.113813
Analog Spatial Light Modulators based on Micromirror Arrays Author(s) Dauderstädt, Ulrike, Dürr, Peter, Gehner, Andreas, Wagner, Michael, Schenk, Harald Type Scientific Article ref. Year of publication 2021 Source Micromachines, Special Issue "Beam Steering via Arrayed Micromachines" Volume 12 Issue/Journal number 5 ISSN 2072-666X DOI https://doi.org/10.3390/mi12050483
Nonlinearity of balanced MEMS loudspeakers: optical experiments and numerical modeling using time-harmonic signals Author(s) Schenk, Harald, Melnikov, Anton, Stolz, Michael, Wall, Franziska, Kaiser, Bert, Mrosk, Andreas, Schuffenhauer, David, Monsalve Guaracao, Jorge Mario, Langa, Sergiu, Schenk, Hermann, Ehrig, Lutz, Conrad, Holger, Ahnert, Maik Type Conference Proceeding no refering Year of publication 2021 Source 27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV) URL https://www.researchgate.net/publication/354465569_Nonlinearity_of_balanced_MEMS_loudspeakers_optical_experiments_and_numerical_modeling_using_time-harmonic_signals
Numerical Simulation of Optical Through-Silicon Waveguide for 3D Photonic Interconnections Author(s) Schenk, Harald, Villasmunta, Francesco, Steglich, Patrick, Schrader, Sigurd, Mai, Andreas Type Conference Proceeding no refering Year of publication 2021 Publisher name IEEE Source 2021 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) ISBN 978-1-6654-1276-6 978-1-6654-4836-9 URL https://ieeexplore.ieee.org/document/9541464 DOI https://doi.org/10.1109/NUSOD52207.2021.9541464
Two-Photon-Lithography Substrate Reflection and Absorption Compensation for Additive Manufacturing of Metamaterials on MEMS Author(s) Schenk, Harald, Schweiger, Severin, Koch, Sandro G. Type Conference Proceeding no refering Year of publication 2021 Source 2021 44th International Spring Seminar on Electronics Technology (ISSE) ISBN 978-1-6654-1477-7 978-1-6654-3061-6 URL https://ieeexplore.ieee.org/document/9467575 DOI https://doi.org/10.1109/ISSE51996.2021.9467575
Highly Modular Microsystem Inchworm Motor Based on a Nanoscopic Electrostatic Drive Author(s) Schenk, Harald, Narimani, Keyvan, Scholles, Michael, Shashank, Shashank, Langa, Sergiu, Pineda Gomez, Roberto, Ruffert, Christine Type Conference Proceeding no refering Year of publication 2021 Publisher name VDE e.V. Source MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg ISBN 978-3-8007-5656-8 978-3-8007-5657-5 URL https://www.vde-verlag.de/proceedings-de/455656160.html
Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers Author(s) Monsalve Guaracao, Jorge Mario, Melnikov, Anton, Kaiser, Bert, Schuffenhauer, David, Stolz, Michael, Ehrig, Lutz, Schenk, Hermann, Conrad, Holger, Schenk, Harald Type Conference Proceeding refering Year of publication 2021 Acoustic transducers; Duffing oscillator; Acoustic electrostatic actuators; equivalent-circuit model; microactuators; Electrostatics; Transducers; Mathematical models; Integrated circuit modeling; Capacitors; Microphones; Force Source IEEE/ASME Transactions on Mechatronics, S. 2612 - 2622 DOI https://doi.org/10.1109/TMECH.2021.3112267
Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation Author(s) Melnikov, Anton, Schenk, Hermann A. G., Monsalve Guaracao, Jorge Mario, Wall, Franziska, Stolz, Michael, Mrosk, Andreas, Langa, Sergiu, Kaiser, Bert Type Scientific Article ref. Year of publication 2021 Engineering; NEMS; Sensors Source Microsystems & Nanoengineering Volume 7 Issue/Journal number 1 ISSN 2055-7434 DOI https://doi.org/10.1038/s41378-021-00265-y
Reliability Aspects of in-plane NED Bending Actuators in Silicon-based MEMS Author(s) Schenk, Harald, Stolz, Michael, Langa, Sergiu, Kaiser, Bert Type Conference Proceeding no refering Year of publication 2021 Publisher name VDE-Verlag Source MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg ISBN 978-3-8007-5656-8 978-3-8007-5657-5 URL https://www.vde-verlag.de/proceedings-de/455656134.html
Two-Photon Lithography Parameter Study for Manufacturing of Acoustic Metamaterials on MEMS Author(s) Schweiger, Severin, Melnikov, Anton, Koch, Sandro G., Schenk, Harald Type Conference Proceeding no refering Year of publication 2021 Publisher name Berlin ; Offenbach : VDE-Verlag Source MikroSystemTechnik Kongress 2021 : Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg, S. 365 - 368 ISBN 978-3-8007-5656-8 URL https://www.vde-verlag.de/proceedings-de/455656092.html
Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation Author(s) Melnikov, Anton, Schenk, Hermann, Wall, Franziska, Spitz, Barbara, Ehrig, Lutz, Langa, Sergiu, Kaiser, Bert, Conrad, Holger, Schenk, Harald, Stolz, Michael Type Conference Proceeding no refering Year of publication 2020 Source SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293 DOI https://doi.org/10.1117/12.2551271
Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen Author(s) Stolz, Michael, Mrosk, Andreas, Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Conrad, Holger, Gaudet, Matthieu, Schenk, Harald Type Conference Proceeding refering Year of publication 2019 Publisher name VDE-Verlag Source MikroSystemTechnik-Kongress, Berlin, Germany, 2019, S. 366 - 369 URL https://www.ipms.fraunhofer.de/de/events/2019/mst-kongress.html
Acoustic validation of electrostatic all-silicon MEMS-speakers Author(s) Ehrig, Lutz, Kaiser, Bert, Schenk, Hermann, Stolz, Michael, Langa, Sergiu, Conrad, Holger, Schenk, Harald, Männchen, Andreas, Brocks, Tobias Type Conference Proceeding no refering Year of publication 2019 Source AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019 URL https://www.aes.org/e-lib/browse.cfm?elib=20522 DOI https://doi.org/10.17743/aesconf.2019.978-1-942220-29-9
Electrostatic all-silicon MEMS audio transducer for in-ear audio applications – acoustic measurements and modelling approach Author(s) Ehrig, Lutz, Schenk, Hermann, Wall, Franziska, Melnikov, Anton, Stolz, Michael, Langa, Sergiu, Kaiser, Bert, Conrad, Holger Type Conference Proceeding no refering Year of publication 2019 Source 23rd International Congress on Acoustics, Aachen, Germany, 2019 DOI https://doi.org/10.18154/RWTH-CONV-239893
Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren Author(s) Spitz, Barbara, Wall, Franziska, Schenk, Hermann, Melnikov, Anton, Ehrig, Lutz, Langa, Sergiu, Stolz, Michael, Kaiser, Bert, Conrad, Holger, Schenk, Harald, Pufe, Wolfram Type Conference Proceeding refering Year of publication 2019 Publisher name VDE-Verlag Source MikroSystemTechnik-Kongress, Berlin, Germany, 2019, S. 54 - 57
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers Author(s) Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David Type Scientific Article ref. Year of publication 2019 Source Microsystems and Nanoengineering Issue/Journal number 5 ISSN 2055-7434 DOI https://doi.org/10.1038/s41378-019-0095-9
MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben Author(s) Schenk, Harald, Conrad, Holger Type patent Year of publication 2018 Patent number WO18193109
Advances in MOEMS technologies for high quality imaging systems Author(s) Schenk, Harald, Wagner, Michael, Grahmann, Jan, Merten, André Editor(s) Kye, Jongwook, Owa, Soichi Type conference publication Year of publication 2018 Publisher name Bellingham, Washington : SPIE Source Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States ISBN 978-1-5106-1666-0 978-1-5106-1667-7 DOI https://doi.org/10.1117/12.2297399 Proceedings of SPIE ; volume 10587
MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications Author(s) Ehrig, Lutz, Kaiser, Bert, Conrad, Holger, Schenk, Hermann, Schuffenhauer, David, Stolz, Michael, Gaudet, Matthieu, Schenk, Harald, Kolkovsky, Vladimir Type Conference Proceeding refering Year of publication 2018 Source Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30, S. 189 - 192
CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen Author(s) Conrad, Holger, Ehrig, Lutz, Kaiser, Bert, Schenk, Hermann, Schuffenhauer, David, Stolz, Michael, Gaudet, Matthieu, Schenk, Harald Type conference publication Year of publication 2018 Publisher name Berlin : Deutsche Gesellschaft für Akustik e.V. (DEGA) Source Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung für Akustik, 19.-22. März 2018, München, S. 892 - 894 ISBN 978-3-939296-13-3
Mikromechanical devices with mechanical actuators Author(s) Conrad, Holger, Gaudet, Matthieu, Schenk, Harald, Uhlig, Sebastian Type patent Year of publication 2018 Patent number EP 3568595 A1
Electrostatically driven in-plane silicon micropump for modular configuration Author(s) Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald Type Scientific Article ref. Year of publication 2018 micropump; electrostatic actuation; nano e-drive; in-plane reciprocating displacement micropump; MEMS Source Micromachines Volume 9 Issue/Journal number 4 ISSN 2072-666X DOI https://doi.org/10.3390/mi9040190
Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach Author(s) Borcia, Rodica, Bestehorn, Michael, Uhlig, Sebastian, Gaudet, Matthieu, Schenk, Harald Type Scientific Article ref. Year of publication 2018 Microfluidic devices; Thin fluid films Source Physical Review Fluids Volume 3 Issue/Journal number 8 ISSN 2469-990X URL https://journals.aps.org/prfluids/abstract/10.1103/PhysRevFluids.3.084202 DOI https://doi.org/10.1103/PhysRevFluids.3.084202
CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators Author(s) Conrad, Holger, Gaudet, Matthieu, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schenk, Harald Type conference publication Year of publication 2017 Publisher name Berlin [u.a.] : VDE-Verlag Source MikroSystemTechnik Kongress 2017, München, Germany, 23.-25. Oktober 2017, S. 219 - 222 ISBN 978-3-8007-4491-6
A contribution to the expansion of the applicability of electrostatic forces in micro transducers Author(s) Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Uhlig, Sebastian, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schimmanz, Klaus Type conference publication Year of publication 2017 Publisher name Bellingham, Washington, USA : SPIE Source MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States ISBN 978-1-5106-0674-6 978-1-5106-0673-9 DOI https://doi.org/10.1117/12.2249575 Proceedings of SPIE ; 10116
Electrostatic bending actuators with liquid filled nanometer scale gap Author(s) Gaudet, Matthieu, Uhlig, Sebastian, Stolz, Michael, Arscott, S., Conrad, Holger, Langa, Sergiu, Kaiser, Bert, Schenk, Harald Type conference publication Year of publication 2017 Publisher name Piscataway, NJ : IEEE Source MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017, S. 175 - 178 ISBN 978-1-5090-5078-9 978-1-5090-5079-6 URL http://ieeexplore.ieee.org/document/7863369/
Electrostatically in-plane driven silicon micropump for modular configuration Author(s) Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald Type conference publication Year of publication 2017 Publisher name Enschede : University of Twente Source Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands, S. 57 - 60 URL http://publica.fraunhofer.de/dokumente/N-477736.html
Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive Author(s) Langa, Sergiu, Conrad, Holger, Kaiser, Bert, Stolz, Michael, Gaudet, Matthieu, Uhlig, Sebastian, Schimmanz, Klaus, Schenk, Harald Type Scientific Article ref. Year of publication 2017 Source Microsystem Technologies, S. 5697 - 5708 Volume 23 Issue/Journal number 1 ISSN 1432-1858 DOI https://doi.org/10.1007/s00542-017-3360-6
Ion-sensitive structure and method of manufacturing the same Author(s) Kurth, Eberhard, Kunath, Christian, Schenk, Harald Type patent Year of publication 2016 Patent number US 2016274057
Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique Author(s) Kolkovsky, Vladimir, Stübner, R., Langa, Sergiu, Wende, U., Kaiser, Bert, Conrad, Holger, Schenk, Harald Type Scientific Article ref. Year of publication 2016 Source Solid-State Electronics, S. 89 - 95 Volume 123 ISSN 0038-1101 DOI https://doi.org/10.1016/j.sse.2016.06.005
A novel electrostatic micro-actuator class and its application potential for optical MEMS Author(s) Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Uhlig, Sebastian, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schimmanz, Klaus Type conference publication Year of publication 2016 Publisher name Piscataway, NJ : IEEE Source 2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings, S. 311-1 - 311-2 ISBN 978-1-5090-1036-3 DOI https://doi.org/10.1109/OMN.2016.7565867
A novel electrostatic actuator class Author(s) Conrad, Holger, Kaiser, Bert, Gaudet, Matthieu, Langa, Sergiu, Stolz, Michael, Uhlig, Sebastian, Schimmanz, Klaus, Schenk, Harald Type Scientific Article ref. Year of publication 2016 Source Procedia Engineering, S. 1533 - 1536 Volume 168 ISSN 1877-7058 DOI https://doi.org/10.1016/j.proeng.2016.11.454
MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben Author(s) Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Schimmanz, Klaus, Langa, Sergiu, Kaiser, Bert Type patent Year of publication 2015 Patent number WO 16202790
Micromechanical element Author(s) Conrad, Holger, Schenk, Harald, Schirrmann, Christian, Zimmer, Fabian, Schmidt, Jan-Uwe, Sandner, Thilo Type patent Year of publication 2015 Patent number US 9164277
Spatially resolved contrast measurement of diffractive micromirror arrays Author(s) Sicker, Cornelius, Heber, Jörg, Berndt, Dirk, Rückerl, Florian, Tinevez, Jean-Yves, Shorte, Spencer, Wagner, Michael, Schenk, Harald Type Scientific Article not ref. Year of publication 2015 Publisher name Bellingham, Wash. : SPIE Source MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States, S. 93750-1 - 93750-10 ISBN 978-1-62841-465-3 Proceedings of SPIE ; 9375
Widely tunable quantum cascade lasers for spectroscopic sensing Author(s) Wagner, J., Ostendorf, Ralf, Grahmann, Jan, Merten, A., Hugger, S., Jarvis, J.-P., Fuchs, F., Boscovic, D., Schenk, Harald Editor(s) Razeghi, Manijeh Type conference publication Year of publication 2015 Publisher name Bellingham, Wash. : SPIE Source Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States, S. 937012-1 - 937012-6 ISBN 978-1-62841-460-8 Proceedings of SPIE ; 9370
Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers) Author(s) Schenk, Harald, Grahmann, Jan, Wagner, Hans-Joachim, Ostendorf, Ralf, Rattunde, Marcel Type patent Year of publication 2015 Patent number US 2016336720
A small-gap electrostatic micro-actuator for large deflections Author(s) Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam Type Scientific Article ref. Year of publication 2015 Source Nature Communications, S. 10078 Issue/Journal number 6 ISSN 2041-1723 DOI https://doi.org/10.1038/ncomms10078
About stress in filled DRIE-trenches Author(s) Kaiser, Bert, Grashoff, Thomas, Drabe, Christian, Conrad, Holger, Schenk, Harald Type Scientific Article ref. Year of publication 2015 Source Journal of Micromechanics and Microengineering (JMM), S. 8085003 Volume 25 Issue/Journal number 8 ISSN 0960-1317 URL http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003
Apparatus and method for guiding optical waves Author(s) Costache, Florenta Adriana, Blasl, Martin, Schenk, Harald Type patent Year of publication 2014 Patent number US 9046704
Elektrostatisch auslenkbares mikromechanisches Bauelement Author(s) Langa, Sergiu, Conrad, Holger, Schenk, Harald, Stolz, Michael Type patent Year of publication 2014 Patent number DE 10 2014 225 934.7
Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings Author(s) Grahmann, Jan, Merten, André, Ostendorf, Ralf, Fontenot, M., Bleh, Daniela, Schenk, Harald, Wagner, Hans-Joachim Type Scientific Article not ref. Year of publication 2014 Publisher name Bellingham : SPIE Press Source SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014, S. 897708-1 - 897708-11 ISBN 978-0-8194-9890-8 Proceedings of SPIE ; 8977
Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera Author(s) Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schroedter, Richard, Schenk, Harald Type Scientific Article not ref. Year of publication 2014 Source Journal of Micro/Nanolithography, MEMS, and MOEMS, S. 011114-1 - 011114-10 Volume 13 Issue/Journal number 1 ISSN 1932-5134
Micro mirrors for high-speed laser deflections and patterning Author(s) Schenk, Harald, Grahmann, Jan, Sandner, Thilo, Wagner, Michael, Dauderstädt, Ulrike, Schmidt, Jan-Uwe Type Scientific Article not ref. Year of publication 2014 Source Physics Procedia, S. 7 - 18 Volume 56 ISSN 1875-3892 DOI https://doi.org/10.1016/j.phpro.2014.08.090
Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers Author(s) Sandner, Thilo, Grashoff, Thomas, Gaumont, E., Schenk, Harald, Kenda, Andreas Type Scientific Article not ref. Year of publication 2014 Source Journal of Micro/Nanolithography, MEMS, and MOEMS, S. 011115-1 - 011115-14 Volume 13 Issue/Journal number 1 ISSN 1932-5134
Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives Author(s) Kenda, Andreas, Kraft, Martin, Tortschanoff, Andreas, Scherf, Werner, Sandner, Thilo, Schenk, Harald, Luettjohann, Stephan, Simon, Apolline Type Scientific Article not ref. Year of publication 2014 Publisher name Bellingham, Wash. : SPIE Source Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States, S. 910102-1 - 910102-10 ISBN 978-1-62841-038-9 Proceedings of SPIE ; 9101
MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring Author(s) Hintschich, Susanne, Pügner, Tino, Knobbe, Jens, Schröder, Julia, Reinig, Peter, Grüger, Heinrich, Schenk, Harald Type Scientific Article not ref. Year of publication 2014 Source Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK, S. 430 - 434
Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator Author(s) Schirrmann, Christian, Costache, Florenta Adriana, Bornhorst, Kirstin, Pawlik, Boscij, Rieck, Andreas, Schenk, Harald Type Scientific Article ref. Year of publication 2014 Source Procedia Engineering, S. 1553 - 1556 Issue/Journal number 87 ISSN 1877-7058
Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components Author(s) Bleh, D., Ostendorf, Ralf, Merten, A., Grahmann, Jan, Schenk, Harald, Kunzer, M., Schmidt, R., Wagner, J. Type conference publication Year of publication 2014 Source International Quantum Cascade Lasers School & Workshop (IQCLSW), Policoro, Italy, S. 1 - 2 URL http://www.iqclsw2014.cnr.it/wp-content/uploads/2014/03/Bleh-IQCLSW2014.pdf?0f100a
Micro-scanning mirrors for high-power laser applications in laser surgery Author(s) Sandner, Thilo, Kimme, S., Grashoff, Thomas, Todt, U., Graf, A., Tulea, C., Lenenbach, A., Schenk, Harald Type conference publication Year of publication 2014 Publisher name Bellingham : SPIE Press Source MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States, S. 897705-1 - 897705-11 ISBN 978-0-8194-9890-8 Proceedings of SPIE ; 8977
Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera Author(s) Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schroedter, R., Schenk, Harald Type conference publication Year of publication 2014 Publisher name Bellingham : SPIE Press Source SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014, S. 897717-1 - 897717-9 ISBN 978-0-8194-9890-8 Proceedings of SPIE ; 8977
MEMS basiertes Durchstimmen von Lasern Author(s) Grahmann, Jan, Wagner, Hans-Joachim, Ostendorf, Ralf, Schenk, Harald, Rattunde, Marcel Type patent Year of publication 2014 Patent number DE 10 2014 201 701.7
Micro-scanning mirrors for high-power laser applications in laser surgery Author(s) Sandner, Thilo, Kimme, S., Grashoff, Thomas, Todt, U., Graf, A., Schenk, Harald, Tulea, C., Lenenbach, A. Type conference publication Year of publication 2013 Publisher name Piscataway, NJ : IEEE Source International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan, S. 83 - 84 ISBN 978-1-4799-1512-5
Optical device comprising a structure for avoiding reflections Author(s) Sandner, Thilo, Schenk, Harald Type patent Year of publication 2013 Patent number DE 10 2008 012 810 B4
Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods Author(s) Langa, Sergiu, Drabe, Christian, Kunath, Christian, Dreyhaupt, André, Schenk, Harald Type Scientific Article not ref. Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 86140-1 - 86140-8 ISBN 978-0-8194-9385-9 DOI https://doi.org/10.1117/12.2003525 Proceedings of SPIE ; 8614
Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera Author(s) Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schenk, Harald, Tortschanoff, Andreas Type conference publication Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 861605-1 - 861605-6 ISBN 978-1-4799-1512-5 Proceedings of SPIE ; 8616
Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer Author(s) Grüger, Heinrich, Knobbe, Jens, Pügner, Tino, Schenk, Harald Type conference publication Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 86160-1 - 86160-13 ISBN 978-0-8194-9385-9 DOI https://doi.org/10.1117/12.2004215 Proceedings of SPIE ; 8616
First application close measurements applying the new hybrid integrated MEMS spectrometer Author(s) Grüger, Heinrich, Pügner, Tino, Knobbe, Jens, Schenk, Harald Type conference publication Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference Next-Generation Spectroscopic Technologies VI, Baltimore, S. 872609-1 - 872609-9 ISBN 978-0-8194-9517-4 DOI https://doi.org/10.1117/12.2016085 Proceedings of SPIE ; 8726
Method for generating a micromechanical structure Author(s) Jung, Denis, Drabe, Christian, Schenk, Harald, Sandner, Thilo, Klose, Thomas, Wolter, Alexander Type patent Year of publication 2013 Patent number DE 10 2008 013 116
Optical position feedback for electrostatically driven MOEMS-scanners Author(s) Tortschanoff, Andreas, Baumgart, M., Frank, A., Wildenhain, Michael, Sandner, Thilo, Schenk, Harald, Kenda, Andreas Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-8 ISBN 978-0-8194-8930-2 URL http://dx.doi.org/10.1117/12.907761 Proceedings of SPIE ; 8252
MOEMS and miniaturized systems XI : San Francisco, California, USA, January 21, 2012 Editor(s) Schenk, Harald, Piyawattanametha, Wibool, Noell, Wilfried Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers First page 825203-1 Last page 825210-6 ISBN 978-0-8194-8930-2 Proceedings of SPIE ; 8252
Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems Author(s) Drabe, Christian, Kallweit, David, Dreyhaupt, Andre, Grahmann, Jan, Schenk, Harald, Davis, Wyatt Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE Press Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 825209-1 - 825209-10 ISBN 978-0-8194-8930-2 DOI https://doi.org/10.1117/12.910203 Proceedings of SPIE ; 8252
Mikromechanisches Bauelement mit erhöhter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same Author(s) Schenk, Harald, Sandner, Thilo Type patent Year of publication 2012 Patent number DE 11 2007 003 051
Micromechanical device with tilted electrodes Author(s) Schenk, Harald, Sandner, Thilo, Drabe, Christian, Klose, Thomas, Jung, Denis Type patent Year of publication 2012 Patent number DE 10 2008 012 825
Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications Author(s) Jung, Denis, Sandner, Thilo, Kallweit, David, Schenk, Harald Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-10 ISBN 978-0-8194-8930-2 URL http://dx.doi.org/10.1117/12.906690 Proceedings of SPIE ; 8252
Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers Author(s) Sandner, Thilo, Grashoff, Thomas, Schenk, Harald, Kenda, Andreas Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE Press Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-10 ISBN 978-0-8194-8930-2 DOI https://doi.org/10.1117/12.909817 Proceedings of SPIE ; 8252
Fluidic Variable Focal length optical Lens and Method of Manufacturing the same Author(s) Costache, Florenta Adriana, Schenk, Harald, Bornhorst, Kirstin, Schirrmann, Christian Type patent Year of publication 2012 Patent number DE 11 2010 005 674.9
Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use Author(s) Klose, Thomas, Wolter, Alexander, Schenk, Harald Type patent Year of publication 2012 Patent number DE10 2006 043 388 (10.04.2008)
Micro Mirrors Author(s) Schenk, Harald, Hornbeck, L. J. Editor(s) Waser, Rainer Type part of book (chapter) Year of publication 2012 Publisher name Weinheim : Wiley-VCH-Verlag Source Nanoelectronics and information technology : advanced electronic materials and novel devices, S. 985 - 999 ISBN 978-3-527-40927-3
Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head Author(s) Grahmann, Jan, Wildenhain, Michael, Grashoff, Thomas, Gerwig, Christian, Dallmann, Hans-Georg, Wolter, Alexander, Schenk, Harald Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 825205-1 - 825205-9 ISBN 978-0-8194-8930-2 URL http://dx.doi.org/10.1117/12.910671 Proceedings of SPIE ; 8252
Realization of a hybrid-integrated MEMS scanning grating spectrometer Author(s) Pügner, Tino, Knobbe, Jens, Grüger, Heinrich, Schenk, Harald Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland, S. 83740-1 - 83740-8 URL http://dx.doi.org/10.1117/12.919068 Proceedings of SPIE ; 8374
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