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Micromechanical devices with mechanical actuators Author(s) Conrad, Holger, Gaudet, Matthieu, Schenk, Harald, Uhlig, Sebastian Type patent Year of publication 2023 Patent number US 11,639,718 URL https://www.freepatentsonline.com/11639718.html Vorrichtung und Verfahren zur Absorption von elektromagnetischer Strahlung, System zur Verwendung in einem Bildsensor, sowie Verfahren zur Herstellung einer Vorrichtung zur Absorption von elektromagnetischer Strahlung Author(s) Augel, Lion, Knobbe, Jens Type patent Year of publication 2023 Patent number DE 10 2021 213 747 URL https://register.dpma.de/DPMAregister/pat/register?AKZ=1020212137474 Vorrichtung, Verfahren und System zur Absorption von elektromagnetischer Strahlung, sowie Verfahren zur Herstellung einer Vorrichtung zur Absorption von elektromagnetischer Strahlung Author(s) Augel, Lion, Knobbe, Jens Type patent Year of publication 2023 Patent number DE 10 2021 213 746 URL https://register.dpma.de/DPMAregister/pat/register?AKZ=1020212137466 A non-destructive electro-acoustic method to characterize the pull-in voltage of electrostatic actuators Author(s) Wall, Franziska, Schenk, Hermann A. G., Melnikov, Anton, Kaiser, Bert, Schenk, Harald Type Scientific Article ref. Year of publication 2023 Pull-in; Electrostatic actuator; Microspeaker; Harmonic distortions Source Nonlinear Dynamics, S. 17809 - 17818 Volume 111 Issue/Journal number 19 ISSN 1573-269X 0924-090X URL https://link.springer.com/article/10.1007/s11071-023-08811-1 DOI https://doi.org/10.1007/s11071-023-08811-1 Design of Micromachined Ultrasonic Transducers for Variability with the Sample-Average Approximation Method Author(s) Monsalve, Jorge M., Kaiser, Bert, Schenk, Harald Type Conference Proceeding refering Year of publication 2023 Publisher name Berlin : VDE Verlag Source Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023, S. 639 ISBN 978-3-8007-6204-0 978-3-8007-6203-3 Implementation of a hand gesture recognition using ultrasound measurements on a NVIDIA Jetson platform with AI-based evaluation Author(s) Jongmanns, Marcel Type image Year of publication 2023 Publisher name VDE Verlag : Berlin ISBN 978-3-8007-6204-0 978-3-8007-6203-3 Noise-Robust Machine Learning Models for Predictive Maintenance Applications Author(s) Suawa Fogou, Priscile, Halbinger, Anja, Jongmanns, Marcel, Reichenbach, Marc Type Conference Proceeding refering Year of publication 2023 Accelerometer Source IEEE Sensors Journal, S. 15081 - 15092 URL https://ieeexplore.ieee.org/document/10122864 DOI https://doi.org/10.1109/JSEN.2023.3273458 Characterization of AlSiCu/TiN/p-Si Schottky Contacts with Nanophotonic Structures for Near-infrared Photodetectors Author(s) Wen, Hanying, Augel, Lion, Wang, Wenjuan, Knobbe, Jens Type Conference Proceeding refering Year of publication 2023 Publisher name Piscataway, NJ : IEEE Source 2023 46th International Spring Seminar on Electronics Technology (ISSE) : 10-14 May 2023 : conference location: Timișoara, Romania, S. 1 - 5 ISBN 979-8-3503-3485-2 979-8-3503-3484-5 URL https://ieeexplore.ieee.org/document/10168510 DOI https://doi.org/10.1109/ISSE57496.2023.10168510 Optical Through-Silicon Waveguides for 3D-Chip-Interconnections Author(s) Villasmunta, Francesco, Steglich, Patrick, Heinrich, Friedhelm, Villringer, Claus, Mai, Andreas, Schrader, Sigurd, Schenk, Harald Type image Year of publication 2023 Integrated Optics; Micro Optics; Optical Information Transmission URL https://www.dgao-proceedings.de/abstract/abstract_only.php?id=2920 TiN-Si Schottky Diodes for SWIR Detection Author(s) Augel, Lion, Wen, Hanying, Knobbe, Jens Type Conference Proceeding refering Year of publication 2023 Publisher name Berlin : VDE Verlag Source Tagungsband MikroSystemTechnik Kongress 2023, Dresden, 23. - 25. Oktober 2023, S. 30 - 34 ISBN 978-3-8007-6204-0 978-3-8007-6203-3 The ForTune Toolbox: Building Solutions for Condition-Based and Predictive Maintenance Focusing on Retrofitting Author(s) Assafo, Maryam, Lautsch, Martin, Suawa, Priscile Fogou, Jongmanns, Marcel, Hübner, Michael, Reichenbach, Marc, Brockmann, Carsten, Reinhardt, Denis, Langendörfer, Peter Type image Year of publication 2023 Publisher name Berlin : VDE Verlag ISBN 978-3-8007-6204-0 978-3-8007-6203-3 Ion-sensitive structure and method for producing the same Author(s) Kurth, Eberhard, Kunath, Christian, Schenk, Harald Type patent Year of publication 2023 Patent number DE 10 2015 204 921 URL https://register.dpma.de/DPMAregister/pat/register?AKZ=1020152049213 MEMS transducer for interacting with a volume flow of a fluid, and method for producing the same Author(s) Schenk, Harald, Conrad, Holger Type patent Year of publication 2023 Patent number US 11,554,950 URL https://www.freepatentsonline.com/11554950.html Elektrostatischer Gegentakt NED-Aktor für Im-Ohr-µLautsprecher Author(s) Ruffert, Christine, Schenk, Hermann A. G., Kaiser, Bert, Ehrig, Lutz, Monsalve Guaracao, Jorge Mario, Langa, Sergiu, Wall, Franziska, Melnikov, Anton, Stolz, Michael, Morsk, Andreas, Schuffenhauer, David, Conrad, Holger, Schenk, Harald Type image Year of publication 2023 URL https://publica.fraunhofer.de/entities/publication/af8b72ee-2b53-4478-a964-a9dfb17ac3ad/details DOI https://doi.org/10.24406/publica-2553 Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion Author(s) Monsalve, Jorge Mario, Melnikov, Anton, Stolz, Michael, Mrosk, Andreas, Jongmanns, Marcel, Wall, Franziska, Langa, Sergiu, Marica-Bercu, Ioana, Brändel, Tim, Kircher, Marco, Schenk, Hermann A. G., Kaiser, Bert, Schenk, Harald Type Scientific Article ref. Year of publication 2022 Source Sensors and Actuators A: Physical Volume Vol. 345 ISSN 1873-3069 0924-4247 DOI https://doi.org/10.1016/j.sna.2022.113813 Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation Author(s) Schweiger, Severin, Schulze, Tim F., Schlipf, Simon, Reinig, Peter, Schenk, Harald Type Scientific Article ref. Year of publication 2022 Source Journal of Optical Microsystems Volume Vol. 2 Issue/Journal number 3 ISSN 2708-5260 DOI https://doi.org/10.1117/1.jom.2.3.033501 The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers Author(s) Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve, Jorge Mario, Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald Type Scientific Article ref. Year of publication 2022 Source Microsystems & Nanoengineering Volume Vol. 8 ISSN 2055-7434 DOI https://doi.org/10.1038/s41378-022-00458-z Highly Modular Microsystem Inchworm Motor Based on a Nanoscopic Electrostatic Drive Author(s) Schenk, Harald, Narimani, Keyvan, Scholles, Michael, Shashank, Shashank, Langa, Sergiu, Pineda Gomez, Roberto, Ruffert, Christine Type Conference Proceeding no refering Year of publication 2021 Publisher name VDE e.V. Source MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg ISBN 978-3-8007-5656-8 978-3-8007-5657-5 URL https://www.vde-verlag.de/proceedings-de/455656160.html Analog Spatial Light Modulators based on Micromirror Arrays Author(s) Dauderstädt, Ulrike, Dürr, Peter, Gehner, Andreas, Wagner, Michael, Schenk, Harald Type Scientific Article ref. Year of publication 2021 Source Micromachines, Special Issue "Beam Steering via Arrayed Micromachines" Volume 12 Issue/Journal number 5 ISSN 2072-666X DOI https://doi.org/10.3390/mi12050483 Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation Author(s) Melnikov, Anton, Schenk, Hermann A. G., Monsalve, Jorge Mario, Wall, Franziska, Stolz, Michael, Mrosk, Andreas, Langa, Sergiu, Kaiser, Bert Type Scientific Article ref. Year of publication 2021 Engineering; NEMS; Sensors Source Microsystems & Nanoengineering Volume 7 Issue/Journal number 1 ISSN 2055-7434 DOI https://doi.org/10.1038/s41378-021-00265-y Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers Author(s) Monsalve, Jorge Mario, Melnikov, Anton, Kaiser, Bert, Schuffenhauer, David, Stolz, Michael, Ehrig, Lutz, Schenk, Hermann, Conrad, Holger, Schenk, Harald Type Conference Proceeding refering Year of publication 2021 Acoustic transducers; Duffing oscillator; Acoustic electrostatic actuators; equivalent-circuit model; microactuators; Electrostatics; Transducers; Mathematical models; Integrated circuit modeling; Capacitors; Microphones; Force Source IEEE/ASME Transactions on Mechatronics, S. 2612 - 2622 DOI https://doi.org/10.1109/TMECH.2021.3112267 Reliability Aspects of in-plane NED Bending Actuators in Silicon-based MEMS Author(s) Schenk, Harald, Stolz, Michael, Langa, Sergiu, Kaiser, Bert Type Conference Proceeding no refering Year of publication 2021 Publisher name VDE-Verlag Source MikroSystemTechnik Kongress 2021 : Mikroelektronik / Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg ISBN 978-3-8007-5656-8 978-3-8007-5657-5 URL https://www.vde-verlag.de/proceedings-de/455656134.html Two-Photon Lithography Parameter Study for Manufacturing of Acoustic Metamaterials on MEMS Author(s) Schweiger, Severin, Melnikov, Anton, Koch, Sandro G., Schenk, Harald Type Conference Proceeding no refering Year of publication 2021 Publisher name Berlin ; Offenbach : VDE-Verlag Source MikroSystemTechnik Kongress 2021 : Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen Innovative Produkte für zukunftsfähige Märkte 08. – 10. November 2021, Stuttgart-Ludwigsburg, S. 365 - 368 ISBN 978-3-8007-5656-8 URL https://www.vde-verlag.de/proceedings-de/455656092.html Nonlinearity of balanced MEMS loudspeakers: optical experiments and numerical modeling using time-harmonic signals Author(s) Schenk, Harald, Melnikov, Anton, Stolz, Michael, Wall, Franziska, Kaiser, Bert, Mrosk, Andreas, Schuffenhauer, David, Monsalve, Jorge Mario, Langa, Sergiu, Schenk, Hermann, Ehrig, Lutz, Conrad, Holger, Ahnert, Maik Type Conference Proceeding no refering Year of publication 2021 Source 27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV) URL https://www.researchgate.net/publication/354465569_Nonlinearity_of_balanced_MEMS_loudspeakers_optical_experiments_and_numerical_modeling_using_time-harmonic_signals Numerical Simulation of Optical Through-Silicon Waveguide for 3D Photonic Interconnections Author(s) Schenk, Harald, Villasmunta, Francesco, Steglich, Patrick, Schrader, Sigurd, Mai, Andreas Type Conference Proceeding no refering Year of publication 2021 Publisher name IEEE Source 2021 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) ISBN 978-1-6654-1276-6 978-1-6654-4836-9 URL https://ieeexplore.ieee.org/document/9541464 DOI https://doi.org/10.1109/NUSOD52207.2021.9541464 Two-Photon-Lithography Substrate Reflection and Absorption Compensation for Additive Manufacturing of Metamaterials on MEMS Author(s) Schenk, Harald, Schweiger, Severin, Koch, Sandro G. Type Conference Proceeding no refering Year of publication 2021 Source 2021 44th International Spring Seminar on Electronics Technology (ISSE) ISBN 978-1-6654-1477-7 978-1-6654-3061-6 URL https://ieeexplore.ieee.org/document/9467575 DOI https://doi.org/10.1109/ISSE51996.2021.9467575 Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation Author(s) Melnikov, Anton, Schenk, Hermann, Wall, Franziska, Spitz, Barbara, Ehrig, Lutz, Langa, Sergiu, Kaiser, Bert, Conrad, Holger, Schenk, Harald, Stolz, Michael Type Conference Proceeding no refering Year of publication 2020 Source SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293 DOI https://doi.org/10.1117/12.2551271 Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen Author(s) Stolz, Michael, Mrosk, Andreas, Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Conrad, Holger, Gaudet, Matthieu, Schenk, Harald Type Conference Proceeding refering Year of publication 2019 Publisher name VDE-Verlag Source MikroSystemTechnik-Kongress, Berlin, Germany, 2019, S. 366 - 369 URL https://www.ipms.fraunhofer.de/de/events/2019/mst-kongress.html Audio-Transducer für In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren Author(s) Spitz, Barbara, Wall, Franziska, Schenk, Hermann, Melnikov, Anton, Ehrig, Lutz, Langa, Sergiu, Stolz, Michael, Kaiser, Bert, Conrad, Holger, Schenk, Harald, Pufe, Wolfram Type Conference Proceeding refering Year of publication 2019 Publisher name VDE-Verlag Source MikroSystemTechnik-Kongress, Berlin, Germany, 2019, S. 54 - 57 Acoustic validation of electrostatic all-silicon MEMS-speakers Author(s) Ehrig, Lutz, Kaiser, Bert, Schenk, Hermann, Stolz, Michael, Langa, Sergiu, Conrad, Holger, Schenk, Harald, Männchen, Andreas, Brocks, Tobias Type Conference Proceeding no refering Year of publication 2019 Source AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019 URL https://www.aes.org/e-lib/browse.cfm?elib=20522 DOI https://doi.org/10.17743/aesconf.2019.978-1-942220-29-9 Electrostatic all-silicon MEMS audio transducer for in-ear audio applications – acoustic measurements and modelling approach Author(s) Ehrig, Lutz, Schenk, Hermann, Wall, Franziska, Melnikov, Anton, Stolz, Michael, Langa, Sergiu, Kaiser, Bert, Conrad, Holger Type Conference Proceeding no refering Year of publication 2019 Source 23rd International Congress on Acoustics, Aachen, Germany, 2019 DOI https://doi.org/10.18154/RWTH-CONV-239893 Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers Author(s) Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David Type Scientific Article ref. Year of publication 2019 Source Microsystems and Nanoengineering Issue/Journal number 5 ISSN 2055-7434 DOI https://doi.org/10.1038/s41378-019-0095-9 Mikromechanical devices with mechanical actuators Author(s) Conrad, Holger, Gaudet, Matthieu, Schenk, Harald, Uhlig, Sebastian Type patent Year of publication 2018 Patent number EP 3568595 A1 MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben Author(s) Schenk, Harald, Conrad, Holger Type patent Year of publication 2018 Patent number WO18193109 Advances in MOEMS technologies for high quality imaging systems Author(s) Schenk, Harald, Wagner, Michael, Grahmann, Jan, Merten, André Editor(s) Kye, Jongwook, Owa, Soichi Type conference publication Year of publication 2018 Publisher name Bellingham, Washington : SPIE Source Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States ISBN 978-1-5106-1666-0 978-1-5106-1667-7 DOI https://doi.org/10.1117/12.2297399 Proceedings of SPIE ; volume 10587 CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen Author(s) Conrad, Holger, Ehrig, Lutz, Kaiser, Bert, Schenk, Hermann, Schuffenhauer, David, Stolz, Michael, Gaudet, Matthieu, Schenk, Harald Type conference publication Year of publication 2018 Publisher name Berlin : Deutsche Gesellschaft für Akustik e.V. (DEGA) Source Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung für Akustik, 19.-22. März 2018, München, S. 892 - 894 ISBN 978-3-939296-13-3 Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach Author(s) Borcia, Rodica, Bestehorn, Michael, Uhlig, Sebastian, Gaudet, Matthieu, Schenk, Harald Type Scientific Article ref. Year of publication 2018 Microfluidic devices; Thin fluid films Source Physical Review Fluids Volume 3 Issue/Journal number 8 ISSN 2469-990X URL https://journals.aps.org/prfluids/abstract/10.1103/PhysRevFluids.3.084202 DOI https://doi.org/10.1103/PhysRevFluids.3.084202 MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications Author(s) Ehrig, Lutz, Kaiser, Bert, Conrad, Holger, Schenk, Hermann, Schuffenhauer, David, Stolz, Michael, Gaudet, Matthieu, Schenk, Harald, Kolkovsky, Vladimir Type Conference Proceeding refering Year of publication 2018 Source Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30, S. 189 - 192 Electrostatically driven in-plane silicon micropump for modular configuration Author(s) Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald Type Scientific Article ref. Year of publication 2018 micropump; electrostatic actuation; nano e-drive; in-plane reciprocating displacement micropump; MEMS Source Micromachines Volume 9 Issue/Journal number 4 ISSN 2072-666X DOI https://doi.org/10.3390/mi9040190 Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive Author(s) Langa, Sergiu, Conrad, Holger, Kaiser, Bert, Stolz, Michael, Gaudet, Matthieu, Uhlig, Sebastian, Schimmanz, Klaus, Schenk, Harald Type Scientific Article ref. Year of publication 2017 Source Microsystem Technologies, S. 5697 - 5708 Volume 23 Issue/Journal number 1 ISSN 1432-1858 DOI https://doi.org/10.1007/s00542-017-3360-6 Electrostatically in-plane driven silicon micropump for modular configuration Author(s) Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald Type conference publication Year of publication 2017 Publisher name Enschede : University of Twente Source Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands, S. 57 - 60 URL http://publica.fraunhofer.de/dokumente/N-477736.html CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators Author(s) Conrad, Holger, Gaudet, Matthieu, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schenk, Harald Type conference publication Year of publication 2017 Publisher name Berlin [u.a.] : VDE-Verlag Source MikroSystemTechnik Kongress 2017, München, Germany, 23.-25. Oktober 2017, S. 219 - 222 ISBN 978-3-8007-4491-6 A contribution to the expansion of the applicability of electrostatic forces in micro transducers Author(s) Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Uhlig, Sebastian, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schimmanz, Klaus Type conference publication Year of publication 2017 Publisher name Bellingham, Washington, USA : SPIE Source MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States ISBN 978-1-5106-0674-6 978-1-5106-0673-9 DOI https://doi.org/10.1117/12.2249575 Proceedings of SPIE ; 10116 Electrostatic bending actuators with liquid filled nanometer scale gap Author(s) Gaudet, Matthieu, Uhlig, Sebastian, Stolz, Michael, Arscott, S., Conrad, Holger, Langa, Sergiu, Kaiser, Bert, Schenk, Harald Type conference publication Year of publication 2017 Publisher name Piscataway, NJ : IEEE Source MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017, S. 175 - 178 ISBN 978-1-5090-5078-9 978-1-5090-5079-6 URL http://ieeexplore.ieee.org/document/7863369/ Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique Author(s) Kolkovsky, Vladimir, Stübner, R., Langa, Sergiu, Wende, U., Kaiser, Bert, Conrad, Holger, Schenk, Harald Type Scientific Article ref. Year of publication 2016 Source Solid-State Electronics, S. 89 - 95 Volume 123 ISSN 0038-1101 DOI https://doi.org/10.1016/j.sse.2016.06.005 A novel electrostatic actuator class Author(s) Conrad, Holger, Kaiser, Bert, Gaudet, Matthieu, Langa, Sergiu, Stolz, Michael, Uhlig, Sebastian, Schimmanz, Klaus, Schenk, Harald Type Scientific Article ref. Year of publication 2016 Source Procedia Engineering, S. 1533 - 1536 Volume 168 ISSN 1877-7058 DOI https://doi.org/10.1016/j.proeng.2016.11.454 A novel electrostatic micro-actuator class and its application potential for optical MEMS Author(s) Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Uhlig, Sebastian, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Schimmanz, Klaus Type conference publication Year of publication 2016 Publisher name Piscataway, NJ : IEEE Source 2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings, S. 311-1 - 311-2 ISBN 978-1-5090-1036-3 DOI https://doi.org/10.1109/OMN.2016.7565867 Ion-sensitive structure and method of manufacturing the same Author(s) Kurth, Eberhard, Kunath, Christian, Schenk, Harald Type patent Year of publication 2016 Patent number US 2016274057 A small-gap electrostatic micro-actuator for large deflections Author(s) Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam Type Scientific Article ref. Year of publication 2015 Source Nature Communications, S. 10078 Issue/Journal number 6 ISSN 2041-1723 DOI https://doi.org/10.1038/ncomms10078 About stress in filled DRIE-trenches Author(s) Kaiser, Bert, Grashoff, Thomas, Drabe, Christian, Conrad, Holger, Schenk, Harald Type Scientific Article ref. Year of publication 2015 Source Journal of Micromechanics and Microengineering (JMM), S. 8085003 Volume 25 Issue/Journal number 8 ISSN 0960-1317 URL http://iopscience.iop.org/article/10.1088/0960-1317/25/8/085003 Widely tunable quantum cascade lasers for spectroscopic sensing Author(s) Wagner, J., Ostendorf, Ralf, Grahmann, Jan, Merten, A., Hugger, S., Jarvis, J.-P., Fuchs, F., Boscovic, D., Schenk, Harald Editor(s) Razeghi, Manijeh Type conference publication Year of publication 2015 Publisher name Bellingham, Wash. : SPIE Source Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States, S. 937012-1 - 937012-6 ISBN 978-1-62841-460-8 Proceedings of SPIE ; 9370 MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben Author(s) Schenk, Harald, Conrad, Holger, Gaudet, Matthieu, Schimmanz, Klaus, Langa, Sergiu, Kaiser, Bert Type patent Year of publication 2015 Patent number WO 16202790 Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers) Author(s) Schenk, Harald, Grahmann, Jan, Wagner, Hans-Joachim, Ostendorf, Ralf, Rattunde, Marcel Type patent Year of publication 2015 Patent number US 2016336720 Spatially resolved contrast measurement of diffractive micromirror arrays Author(s) Sicker, Cornelius, Heber, Jörg, Berndt, Dirk, Rückerl, Florian, Tinevez, Jean-Yves, Shorte, Spencer, Wagner, Michael, Schenk, Harald Type Scientific Article not ref. Year of publication 2015 Publisher name Bellingham, Wash. : SPIE Source MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States, S. 93750-1 - 93750-10 ISBN 978-1-62841-465-3 Proceedings of SPIE ; 9375 Micromechanical element Author(s) Conrad, Holger, Schenk, Harald, Schirrmann, Christian, Zimmer, Fabian, Schmidt, Jan-Uwe, Sandner, Thilo Type patent Year of publication 2015 Patent number US 9164277 Elektrostatisch auslenkbares mikromechanisches Bauelement Author(s) Langa, Sergiu, Conrad, Holger, Schenk, Harald, Stolz, Michael Type patent Year of publication 2014 Patent number DE 10 2014 225 934.7 Design an fabrication of a tunable two-fluid micro-lens device with a large deflection polymer actuator Author(s) Schirrmann, Christian, Costache, Florenta Adriana, Bornhorst, Kirstin, Pawlik, Boscij, Rieck, Andreas, Schenk, Harald Type Scientific Article ref. Year of publication 2014 Source Procedia Engineering, S. 1553 - 1556 Issue/Journal number 87 ISSN 1877-7058 Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components Author(s) Bleh, D., Ostendorf, Ralf, Merten, A., Grahmann, Jan, Schenk, Harald, Kunzer, M., Schmidt, R., Wagner, J. Type conference publication Year of publication 2014 Source International Quantum Cascade Lasers School & Workshop (IQCLSW), Policoro, Italy, S. 1 - 2 URL http://www.iqclsw2014.cnr.it/wp-content/uploads/2014/03/Bleh-IQCLSW2014.pdf?0f100a Micro-scanning mirrors for high-power laser applications in laser surgery Author(s) Sandner, Thilo, Kimme, S., Grashoff, Thomas, Todt, U., Graf, A., Tulea, C., Lenenbach, A., Schenk, Harald Type conference publication Year of publication 2014 Publisher name Bellingham : SPIE Press Source MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States, S. 897705-1 - 897705-11 ISBN 978-0-8194-9890-8 Proceedings of SPIE ; 8977 Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera Author(s) Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schroedter, R., Schenk, Harald Type conference publication Year of publication 2014 Publisher name Bellingham : SPIE Press Source SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014, S. 897717-1 - 897717-9 ISBN 978-0-8194-9890-8 Proceedings of SPIE ; 8977 MEMS basiertes Durchstimmen von Lasern Author(s) Grahmann, Jan, Wagner, Hans-Joachim, Ostendorf, Ralf, Schenk, Harald, Rattunde, Marcel Type patent Year of publication 2014 Patent number DE 10 2014 201 701.7 Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings Author(s) Grahmann, Jan, Merten, André, Ostendorf, Ralf, Fontenot, M., Bleh, Daniela, Schenk, Harald, Wagner, Hans-Joachim Type Scientific Article not ref. Year of publication 2014 Publisher name Bellingham : SPIE Press Source SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014, S. 897708-1 - 897708-11 ISBN 978-0-8194-9890-8 Proceedings of SPIE ; 8977 MEMS-based miniature near-infrared spectrometer for application in environmental and food monitoring Author(s) Hintschich, Susanne, Pügner, Tino, Knobbe, Jens, Schröder, Julia, Reinig, Peter, Grüger, Heinrich, Schenk, Harald Type Scientific Article not ref. Year of publication 2014 Source Proceedings of the 8th International Conference on Sensing Technology, Sep. 2-4, 2014, Liverpool, UK, S. 430 - 434 Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera Author(s) Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schroedter, Richard, Schenk, Harald Type Scientific Article not ref. Year of publication 2014 Source Journal of Micro/Nanolithography, MEMS, and MOEMS, S. 011114-1 - 011114-10 Volume 13 Issue/Journal number 1 ISSN 1932-5134 Micro mirrors for high-speed laser deflections and patterning Author(s) Schenk, Harald, Grahmann, Jan, Sandner, Thilo, Wagner, Michael, Dauderstädt, Ulrike, Schmidt, Jan-Uwe Type Scientific Article not ref. Year of publication 2014 Source Physics Procedia, S. 7 - 18 Volume 56 ISSN 1875-3892 DOI https://doi.org/10.1016/j.phpro.2014.08.090 Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers Author(s) Sandner, Thilo, Grashoff, Thomas, Gaumont, E., Schenk, Harald, Kenda, Andreas Type Scientific Article not ref. Year of publication 2014 Source Journal of Micro/Nanolithography, MEMS, and MOEMS, S. 011115-1 - 011115-14 Volume 13 Issue/Journal number 1 ISSN 1932-5134 Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives Author(s) Kenda, Andreas, Kraft, Martin, Tortschanoff, Andreas, Scherf, Werner, Sandner, Thilo, Schenk, Harald, Luettjohann, Stephan, Simon, Apolline Type Scientific Article not ref. Year of publication 2014 Publisher name Bellingham, Wash. : SPIE Source Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States, S. 910102-1 - 910102-10 ISBN 978-1-62841-038-9 Proceedings of SPIE ; 9101 Apparatus and method for guiding optical waves Author(s) Costache, Florenta Adriana, Blasl, Martin, Schenk, Harald Type patent Year of publication 2014 Patent number US 9046704 Micro-scanning mirrors for high-power laser applications in laser surgery Author(s) Sandner, Thilo, Kimme, S., Grashoff, Thomas, Todt, U., Graf, A., Schenk, Harald, Tulea, C., Lenenbach, A. Type conference publication Year of publication 2013 Publisher name Piscataway, NJ : IEEE Source International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan, S. 83 - 84 ISBN 978-1-4799-1512-5 Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera Author(s) Sandner, Thilo, Grashoff, Thomas, Schwarzenberg, Markus, Schenk, Harald, Tortschanoff, Andreas Type conference publication Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 861605-1 - 861605-6 ISBN 978-1-4799-1512-5 Proceedings of SPIE ; 8616 Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer Author(s) Grüger, Heinrich, Knobbe, Jens, Pügner, Tino, Schenk, Harald Type conference publication Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 86160-1 - 86160-13 ISBN 978-0-8194-9385-9 DOI https://doi.org/10.1117/12.2004215 Proceedings of SPIE ; 8616 First application close measurements applying the new hybrid integrated MEMS spectrometer Author(s) Grüger, Heinrich, Pügner, Tino, Knobbe, Jens, Schenk, Harald Type conference publication Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference Next-Generation Spectroscopic Technologies VI, Baltimore, S. 872609-1 - 872609-9 ISBN 978-0-8194-9517-4 DOI https://doi.org/10.1117/12.2016085 Proceedings of SPIE ; 8726 Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods Author(s) Langa, Sergiu, Drabe, Christian, Kunath, Christian, Dreyhaupt, André, Schenk, Harald Type Scientific Article not ref. Year of publication 2013 Publisher name Bellingham, Wash. : SPIE Source SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013, S. 86140-1 - 86140-8 ISBN 978-0-8194-9385-9 DOI https://doi.org/10.1117/12.2003525 Proceedings of SPIE ; 8614 Method for generating a micromechanical structure Author(s) Jung, Denis, Drabe, Christian, Schenk, Harald, Sandner, Thilo, Klose, Thomas, Wolter, Alexander Type patent Year of publication 2013 Patent number DE 10 2008 013 116 Optical device comprising a structure for avoiding reflections Author(s) Sandner, Thilo, Schenk, Harald Type patent Year of publication 2013 Patent number DE 10 2008 012 810 B4 Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers Author(s) Sandner, Thilo, Grashoff, Thomas, Schenk, Harald, Kenda, Andreas Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE Press Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-10 ISBN 978-0-8194-8930-2 DOI https://doi.org/10.1117/12.909817 Proceedings of SPIE ; 8252 Optical position feedback for electrostatically driven MOEMS-scanners Author(s) Tortschanoff, Andreas, Baumgart, M., Frank, A., Wildenhain, Michael, Sandner, Thilo, Schenk, Harald, Kenda, Andreas Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-8 ISBN 978-0-8194-8930-2 URL http://dx.doi.org/10.1117/12.907761 Proceedings of SPIE ; 8252 Vertical comb drive microscanners for beam steering, linear scanning and laser projection applications Author(s) Jung, Denis, Sandner, Thilo, Kallweit, David, Schenk, Harald Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 82520-1 - 82520-10 ISBN 978-0-8194-8930-2 URL http://dx.doi.org/10.1117/12.906690 Proceedings of SPIE ; 8252 Realization of a hybrid-integrated MEMS scanning grating spectrometer Author(s) Pügner, Tino, Knobbe, Jens, Grüger, Heinrich, Schenk, Harald Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference Next-Generation Spectroscopic Technologies V, 23 - 24 April 2012, Baltimore, Maryland, S. 83740-1 - 83740-8 URL http://dx.doi.org/10.1117/12.919068 Proceedings of SPIE ; 8374 Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head Author(s) Grahmann, Jan, Wildenhain, Michael, Grashoff, Thomas, Gerwig, Christian, Dallmann, Hans-Georg, Wolter, Alexander, Schenk, Harald Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 825205-1 - 825205-9 ISBN 978-0-8194-8930-2 URL http://dx.doi.org/10.1117/12.910671 Proceedings of SPIE ; 8252 Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems Author(s) Drabe, Christian, Kallweit, David, Dreyhaupt, Andre, Grahmann, Jan, Schenk, Harald, Davis, Wyatt Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE Press Source SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012, S. 825209-1 - 825209-10 ISBN 978-0-8194-8930-2 DOI https://doi.org/10.1117/12.910203 Proceedings of SPIE ; 8252 Mikromechanisches Bauelement mit erhöhter Steifigkeit und Verfahren zum Herstellen desselben (Micromechanical component having inncreased stiffness, and method for the production of the same Author(s) Schenk, Harald, Sandner, Thilo Type patent Year of publication 2012 Patent number DE 11 2007 003 051 Micro Mirrors Author(s) Schenk, Harald, Hornbeck, L. J. Editor(s) Waser, Rainer Type part of book (chapter) Year of publication 2012 Publisher name Weinheim : Wiley-VCH-Verlag Source Nanoelectronics and information technology : advanced electronic materials and novel devices, S. 985 - 999 ISBN 978-3-527-40927-3 MOEMS and miniaturized systems XI : San Francisco, California, USA, January 21, 2012 Editor(s) Schenk, Harald, Piyawattanametha, Wibool, Noell, Wilfried Type conference publication Year of publication 2012 Publisher name Bellingham : SPIE, The Society of Photo-Optical Instrumentation Engineers First page 825203-1 Last page 825210-6 ISBN 978-0-8194-8930-2 Proceedings of SPIE ; 8252 Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use Author(s) Klose, Thomas, Wolter, Alexander, Schenk, Harald Type patent Year of publication 2012 Patent number DE10 2006 043 388 (10.04.2008) Micromechanical device with tilted electrodes Author(s) Schenk, Harald, Sandner, Thilo, Drabe, Christian, Klose, Thomas, Jung, Denis Type patent Year of publication 2012 Patent number DE 10 2008 012 825 Fluidic Variable Focal length optical Lens and Method of Manufacturing the same Author(s) Costache, Florenta Adriana, Schenk, Harald, Bornhorst, Kirstin, Schirrmann, Christian Type patent Year of publication 2012 Patent number DE 11 2010 005 674.9
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