Current Projects

Lab infrastructure for the EIZ (federal/state, 85056897)

Brief description
Within the framework of this project, the infrastructural requirements for the »ES&EW« laboratory are being created.

Cooperation Partner:

  • Chair of Thermal Energy Technology
    Brandenburg University of Technology
    Prof. Dr. rer. nat. Lars Röntzsch
    Siemens-Halske-Ring 13
    03046 Cottbus
  • Chair of Ccombustion Engines and Flight Propulsion
    Brandenburg University of Technology
    Prof. Dr.-Ing. Heinz Peter Berg
    Siemens-Halske-Ring 14
    03046 Cottbus

  • Chair of Thermodynamics/Thermal Process Engineering
    Brandenburg University of Technology
    Prof. Dr.-Ing. Fabian Mauß
    Siemens-Halske-Ring 8
    03046 Cottbus

Project manager:
Prof. Dr. rer. nat. habil. Jan Ingo Flege
Fabian Rachow

Duration:
29.09.2022 – 30.06.2026

Index of advancement:
85056897

Promotional institution:
This project is supported by the federal government with funds from the Coal Regions Investment Act and co-financed with funds from the state of Brandenburg.

Further information:

Energy Innovation Center (BMBF, 03SF0693A)

Brief description (only in German)
Im »ES&EW«-Labor sollen die drei Ebenen für Sektor-gekoppelte Energiesysteme – Wärme, Strom und Mobilität – in einem CO2 neutralen Kreislaufansatz, basierend auf Wasserstoff, abgebildet werden.
Auf allen Ebenen werden dafür die entsprechenden Elemente des Kreislaufansatzes entwickelt und optimiert, beginnend mit der Wasserstoffproduktion in unterschiedlichen Druckstufen und Verfahrenstechniken entsprechend des gewünschten Einsatzes (Hochdruck → Mobilität, Niederdruck → weitere Synthese).
Darauf aufbauend geht es um die Weiterverarbeitung des Wasserstoffs zu den synthetischen Kohlenwasserstoffen Methan und Methanol, sowie deren Rückverstromung im Oxyfuel-Prozess für eine emissionsfreie Rückführung der Abgase, in Form von hochkonzentriertem und reinem CO2, in den Stoffkreislauf.
Dabei wird jede der drei Ebenen in einem verständnisbasierten und simulationsgestützten Entwicklungsprozess im engen Austausch mit den EIZ-Einrichtungen EECON, DIVERSY, Scale-Up Lab, MoWes und SCL, für den Einsatz im Kreislaufsystem optimiert und weiterentwickelt.

In dem neu aufzubauenden »ES&EW«-Labor wird mit fortschrittlicher Messtechnik eine detaillierte Charakterisierung der Materialien, Komponenten und Prozessführung sowie die Optimierung ihres Zusammenspiels angestrebt.
Dazu wird aufbauend auf detaillierten experimentellen Analysen eine neuartige modellbasierte Simulations- und Optimierungsplattform entwickelt, die eine umfangreiche Prototypenvalidierung im frühen Entwicklungszeitraum ermöglicht.

Cooperation Partner:

  • Chair of Thermal Energy Technology
    Brandenburg University of Technology
    Prof. Dr. rer. nat. Lars Röntzsch
    Siemens-Halske-Ring 13
    03046 Cottbus
  • Chair of Ccombustion Engines and Flight Propulsion
    Brandenburg University of Technology
    Prof. Dr.-Ing. Heinz Peter Berg
    Siemens-Halske-Ring 14
    03046 Cottbus

  • Chair of Thermodynamics/Thermal Process Engineering
    Brandenburg University of Technology
    Prof. Dr.-Ing. Fabian Mauß
    Siemens-Halske-Ring 8
    03046 Cottbus

Project manager:
Prof. Dr. rer. nat. habil. Jan Ingo Flege
Fabian Rachow

Duration:
01.08.2022 – 31.07.2026

Index of advancement:
03SF0693A

Promotional institution:
Federal Ministry of Education and Research (BMBF)
Funds of BMBF and funds for measures to strenghten the coal region

Keywords:
Sector coupling, CO2-free circular economy, synthetic fuels

Trustworthy Hydrogen (Graduate School)

BTU-BAM Graduate School »Trustworthy Hydrogen«PhD Topic 2 »Novel materials and coatings for the detection of hydrogen and hydrocarbons«

iCampus 2 (BMBF, 16ME0420K)

Innovation campus electronics and microsensing Cottbus - iCampus2Topic: »Environmental Sensors«; Subproject: »Sensor technology for fluid fuels«

Brief description
In the context of the energy transition, Lusatia as a traditional energy region is structurally changing from a coal-mining region to a model region for the hydrogen strategy, with (carbon) hydrocarbons (synthetic fuels) as important energy carriers of the future for stationary and mobile applications. This creates an enormous demand for powerful sensors for safety-related monitoring during transport and storage of the fluid fuels as well as their use by the end customer.
The goal of this subproject is a combined sensor array based on the merging of two technologies (IHP, IPMS) for the future synchronous detection of hydrogen and hydrocarbons, which is self-calibrating and can be coupled to existing sensor networks.
To this end, the sensor concepts for resistive and optical silicon-based sensors developed in the first phase of iCampµs will initially be consolidated in the second phase through design and material optimization steps. In parallel, the technological approaches for the realization of matrix arrangements will first be created, which in perspective will form the basis on the one hand for the connection of several sensors (e.g. electronic noses) and on the other hand for intelligent signal processing. Subsequently, the two sensor principles are to be merged into a CMOS-compatible platform, including a digital interface with generic functionality. In the process, a configurable multi-purpose platform for signal and data processing with the ability to interface to standard wired and wireless industrial networks and to a 5G standard platform will be developed.

Cooperation Partner:

  • Chair of Experimental Physics and functional Materials
    Brandenburg University of Technology Cottbus - Senftenberg
    Prof. Dr. rer. nat. habil. Inga Fischer
    Erich-Weinert-Straße 1
    03046 Cottbus
  • Chair of Micro and nano systems
    Brandenburg University of Technology Cottbus - Senftenberg
    Prof. Dr.-Ing. Dr. rer. nat. habil. Harald Schenk
    Konrad-Zuse-Straße 1
    D-03046 Cottbus

  • IHP GmbH – Leibniz Institut für innovative Mikroelektronik
    Prof. Dr. rer. nat. habil. Christian Wenger
    Im Technologiepark 25
    15236 Frankfurt (Oder)
  • Fraunhofer Institute for Photonic Microsystems (IPMS)
    Institute section »Integrated Silicon Systems«
    Dr. Sebastian Meyer
    Konrad-Zuse-Straße 1
    03046 Cottbus
  • Chair of Computer Engineering
    Brandenburg University of Technology Cottbus - Senftenberg
    Prof. Dr.-Ing. Michael Hübner
    (Dr.-Ing. Marc Reichenbach, Substitute Professor)
    Konrad-Wachsmann-Allee 5
    03046 Cottbus

Project manager:
Prof. Dr. rer. nat. habil. Jan Ingo Flege

Duration:
01.01.2022 – 31.12.2026

Index of advancement:
16ME0420K

Promotional institution:
Federal Ministry of Education and Research (BMBF)
within the German Federal Government’s Framework Programme for Research and Innovation 2021–2024
»Microelectronics. Trustworthy and sustainable. For Germany and Europe.«

Keywords:
gas sensors, micro-structering, atomic layer deposition, sensor platform, intelligent signal processing

Further information:

ALD on perovskite layers ( BMWK, ZIM, KK5087602BR1)

Al2O3-ALD on hybride perovskite layers Sub-project: Preparation of the perovskite layers and spectrosocopic characterization of the ALD and perovskite layers

Brief description
The overall objective of the project is to further develop an atomic layer deposition (ALD) process of high quality ultrathin alumina films for their low temperature (~80°C) deposition on large area organic-inorganic perovskite layers. The synthesis and deposition of the perovskite layers will also be developed within the project. The ALD process on perovskite layers will primarily be applied for passivation layers in perovskite solar cells (PSCs), but it is also highly relevant for other optoelectronic devices and e.g. sensors and batteries. PSCs have experienced an immense increase in efficiency within a very short time, but their low long-term stability is the main obstacle to market introduction. To increase the long-term stability, an ultra-thin ALD passivation layer is used, which is produced at low process temperatures and in a very controlled manner preventing the thermally sensitive perovskite layers from degradation and ensuring the necessary transport of the charge carriers generated by the photoelectric conversion through the passivation layer to the electrode.

Cooperation partner:
SENTECH Instruments GmbH
Schwarzschildstraße 2
12489 Berlin

Project manager:
Prof. Dr. rer. nat. habil. Jan Ingo Flege
Dr. rer. nat. Małgorzata Kot

Duration:
01.07.2021 – 31.12.2023

Index of advancement:
KK508760BR1

Promotional institution:
Federal Ministry for Economic Affairs and Climate Action (BMWK) in the framework of Central Innovation Programme for SMEs (ZIM)

Keywords:
Atomic layer deposition, perovskite solar cells

MOVPE-AlGaO layers (DFG, FL 548/13-1)

MOVPE growth and characterization of (AlxGa1-x)2O3 thin films for high power devices

Brief description:
Beta-type gallium oxide (β-Ga2O3) provides promising perspectives for high-power applications outperforming current key technology because for β-Ga2O3 a considerably stronger electrical breakdown field is predicted. In addition, it offers potentially low cost and large substrate size preparation from bulk crystals with controllable n-type doping in comparison to other promising materials. The performance of high-power devices directly depends on the breakdown field to the power of three as well as on the mobility of the charge carriers. The incorporation of aluminum into β-Ga2O3 allows tuning the band gap and consequently the breakdown field. Therefore, a suitable material growth method is required resulting in high-quality binary oxide thin films with optimized band gap and uncompromised materials properties.
Hence, in this project we propose to develop a novel approach based on metal-organic vapor phase epitaxy (MOVPE) of β-(AlxGa1-x)2O3 (AlGaO) thin films on lattice-matched (100)-oriented β-Ga2O3 enabling the growth at temperatures above 800°C with an enhanced solubility of aluminum in β-Ga2O3. For this purpose, we will initially grow bulk aluminum-doped β-Ga2O3 single crystals exhibiting a minimal lattice mismatch with the targeted AlGaO films. Subsequently, the quasi-homoepitaxial growth of high-quality AlGaO thin films on these substrates by MOVPE will be engineered and optimized thanks to the detailed insights from sophisticated materials characterization. Our concerted, systematic use of atomic force, electron, and photoemission microscopy, in situ x-ray and electron diffraction, spectroscopic ellipsometry as well as photoelectron spectroscopy techniques will facilitate to unravel the growth mode, morphology, composition as well as the structural, electronic, electrical, and optical properties of the AlGaO thin films.
Specifically, we will determine the limiting factors for Al distribution and its maximally possible incorporation into β-Ga2O3 without phase separation. Then, we will explore the possibilities for band gap and strain engineering in the AlGaO system, investigate the surface morphology as well as the interface of the AlGaO on β-Ga2O3 system, and perform electrical and structural analysis to understand the process of defect formation and the role of impurities.
Our strategy is threefold: (1) preparation of epitaxy-ready aluminum-doped (up to 15%) bulk β-Ga2O3 crystals (2 cm to 2 inches in diameter) as substrates for the subsequent quasi-homoepitaxial growth of AlGaO thin layers and characterization of the obtained films to (2) optimize the growth and to (3) evaluate the application-relevant properties. Particularly, the project focuses on the preparation and characterization of epitaxial AlGaO with maximum aluminum incorporation resulting in the highest possible increase of the band gap and the breakdown field.

Cooperation Partner:

  • Dr. Andreas Popp and Dr. Zbigniew Galazka
    Leibniz-Institut für Kristallzüchtung (IKZ)
    Abteilung Schichten und Nanostrukturen
    Max-Born-Straße 2
    12489 Berlin
  • Dr. Vedran Vonk
    Deutsches Elektronen-Synchrotron (DESY) Standort Hamburg DESY
    Research Group X-ray Physics and Nanoscience
    DESY Nanolaboratory
    Notkestr. 85
    D-22607 Hamburg

Project manager:
Prof. Dr. rer. nat. habil. Jan Ingo Flege

Duration:
2022-2024 (3 years)

Index of advancement:
FL 548/13-1

Project number:
491040331 (GEPRIS)

Promotional institution:
German Research Foundation (DFG)

Keywords:
gallium oxide, metal-organic vapor phase epitaxy, materials characterization, photoelectron spectroscopy, X-ray diffraction

In-situ process monitoring (MWFK, EFRE, 85053620)

In-situ process monitoring for the optimized thin film deposition of functional oxides

Brief description:
The project focuses on the consolidation of the materials research infrastructure for innovative applications in sensorics, microelectronics, photovoltaics, »Power to X to Power« technology, integrated energy, and sustainable mobility.
To fulfill this, existing material deposition systems will be adapted by modular extensions. In particular, atomic layer deposition (ALD) as well as physical vapor deposition (PVD) units will be upgraded by operando (i.e., real-time) respectively in-situ material characterization methods. Thus, the functionality of the combined material deposition and characterization systems will be improved by the possibility to carry out ellipsometry, quadrupole mass spectrometry, and low-energy electron diffraction (LEED) measurements during the material deposition process. This allows performing sophisticated operando and in-situ studies in the basic and applied research fields of ALD and PVD.

Project manager:
Prof. Dr. rer. nat. habil. Jan Ingo Flege

Duration:
17.08.2021 - 31.08.2023 (Grant period)
01.09.2021 - 31.12.2022 (Execution period)

Index of advancement:
85053620

Promotional institution:
Europaen Regional Development Fund (EFRE) in the management of the Ministery for Science, Research and Culture (MWFK)

Promotional programme:
"Promotion of infrastructure, research, development, and innovation in the framework of EFRE (InfraFEI)"
General Informationen about Europaen Regional Development Fund.

Keywords:
Ellipsometry, quadrupole mass spectrometry (QMS), low-energy electron diffraction (LEED), atomic layer deposition (ALD), physical vapor deposition (PVD)

T-Cell (BMWK, 03EWS002A)

TurboFuelCell - Multi-disciplinary component development for hybrid micro gas turbine - SOFC systemSubproject: Periphery develpoment for the integration of pressure-charged high-temperature fuel cells into an overall micro gas turbine SOFC system

Project part: Afterburner/Reformer Unit

Brief description:
The "Turbo Fuel Cell R&D" project comprises the development of a hybrid energy conversion unit consisting of a micro gas turbine (MGT) and a high temperature fuel cell (SOFC). The focus is on component development and system integration for the construction of a prototype. In the overall project, 10 chairs of BTU Cottbus-Senftenberg are working in cooperation with the Fraunhofer Institute IKTS.
In the Afterburner/Reformer subproject, a combined system of reformer and afterburner is being developed for energetically optimizing the heat balance. For the catalytic steam reforming of methane and water to hydrogen and carbon dioxide, a temperature level of approx. 1000°C has to be chosen for the use of nickel-based catalysts, which has to be achieved by afterburning the exhaust gas of SOFC and MGT. The dependence of educt gas composition and flow rate, temperature and pressure derived from the experiment are used as a basis for model development. In the next step, the model being developed will serve as the basis for the simulation of complex geometries of the afterburner/refomer unit.

Cooperation Partner:

  • Lehrstuhl Thermodynamik/Thermische Verfahrenstechnik
    Brandenburg University of Technology Cottbus - Senftenberg
    Prof. Dr.-Ing. Fabian Mauß
    Siemens-Halske-Ring 8
    03046 Cottbus
  • Lehrstuhl Verbrennungskraftmaschinen und Flugantriebe
    Brandenburg University of Technology Cottbus - Senftenberg
    Prof. Dr.-Ing. Heinz Peter Berg
    Siemens-Halske-Ring 14
    03046 Cottbus

  • Fraunhofer Institute for Ceramic Technologies and Systems  IKTS
    Dr. Stefan Megel
    01277 Dresden

Duration:
01.01.2020 – 31.03.2023

Index of advancement:
03EWS002A

Promotional institution:
Federal Ministry for Economic Affairs and Climate Action (BMWK)
in the framework of the 7th Energy Research Program of the Federal Goverment

Keywords:
 

Further information:

ForLab FAMOS (BMBF, 16ES0935)

Reasearch Lab Micorelectronics Cottbus-Senftenberg for Silicon-based Optoelectronics

Brief description

Motivation
Universities are a key innovation factor in the research-intensive microelectronics sector. Research at the highest international level is to be made possible to a greater extent by investing in state-of-the-art equipment and facilities at universities. Twelve "Research Laboratories Microelectronics Germany" are to open up new research fields for the microelectronics of the future and train young scientists with state-of-the-art equipment. The "Research Laboratories Microelectronics Germany" network with each other and with external partners for better scientific exchange and stronger cooperation.

Aims and  Approach
The new facilities at ForLab FAMOS will be used to integrate new materials (the semiconductors GeSn and SiGeSn, oxides, two-dimensional materials and polymers) into a mature silicon platform. This integration of new materials is expected to result in innovative optoelectronic devices, in particular sensors and integrated light sources, for optical data transmission or biosensors. The ForLab FAMOS will thus bring the BTU Cottbus-Senftenberg also internationally on top level in the research field of optoelectronic devices.

Innovations and Prospects
Electro-optical technologies can be used for faster and more energy-efficient data transmission, and optical biosensors can be configured specifically to desired applications. Potential applications range from rapid or on-site testing in emergency medicine (to detect sepsis) to self-monitoring (measuring hormone levels in saliva) and up to industrial process monitoring (such as food quality).

Cooperation Partner:

  • Fachgebiet Experimentalphysik und Funktionale Materialien
    Brandenburg University of Technology Cottbus - Senftenberg
    Prof. Dr. rer. nat. habil. Inga Fischer
    Erich-Weinert-Straße 1
    03046 Cottbus
  • Chair of General Electrical Engineering
    Brandenburg University of Technology Cottbus - Senftenberg
    Prof. Dr. rer. nat. Michael Beck
    Universitätsplatz 1
    01968 Senftenberg

Project manager:
Prof. Dr. Inga Fischer

Duration:
01.01.2019 – 31.12.2022

Index of advancement:
16ES0935

Promotional institution:
Federal Ministry of Education and Research (BMBF)
in the framework of the programme
"Forschungslabore Mikroelektronik Deutschland (ForLab)"

Keywords:
GeSn, SiGeSn, Oxides, 2D-Materials, Optical and biosensors

Further information: