Paper published in »JVSTA« and selected as »Editor's Pick« - Chair of Applied Physics and Semiconductor Spectroscopy

A joint publication with coauthors from SENTECH Instruments GmbH, Berlin, has been published in »Journal of Vacuum Science and Technology A« and has been selected as »Editor's Pick« by the editors .

A. Mahmoodinezhad, C. Janowitz, F. Naumann, P. Plate, H. Gargouri, K. Henkel, D. Schmeißer, J. I. Flege
Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Journal of Vacuum Science and Technology A, 38 (2020) 022404
Online (DOI)
This article may be downloaded here for personal use only. Any other use requires prior permission of the author and AIP Publishing.

Contact

Dr.-Ing. Karsten Henkel
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5354
karsten.henkel(at)b-tu.de

Prof. Dr. rer. nat. habil. Jan Ingo Flege
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5352
flege(at)b-tu.de

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