Paper published

A joint publication with coauthors from SENTECH Instruments GmbH, Berlin, has been published in »Journal of Vacuum Science and Technology B«.

F. Naumann, J. Reck, H. Gargouri, B. Gruska, A. Blümich, A. Mahmoodinezhad, C. Janowitz, K. Henkel, J. I. Flege
In-situ real-time and ex-situ spectroscopic analysis of Al₂O₃ films prepared by plasma enhanced atomic layer deposition
Journal of Vacuum Science and Technology B 38 (2020) 014014
Online (DOI)
This article may be downloaded here for personal use only. Any other use requires prior permission of the author and AIP Publishing.

Contact persons

Ali Mahmoodinezhad
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5355
Ali.Mahmoodinezhad(at)b-tu.de

Dr.-Ing. Karsten Henkel
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5354
karsten.henkel(at)b-tu.de

Back

This website uses cookies. There are two types of cookies: The first type supports the basic functionality of our website. The second allows us to improve our content for you by saving and analyzing pseudonymised user data. Since this second type is technically not required to run the website, you can withdraw your consent to those cookies at any time. For more information please visit our pages on data protection.

Mandatory

These cookies are needed for a smooth operation of our website.

Statistic

For statistical reasons, we use the platform Matomo to analyse the user flow with the help of website users‘ pseudonymised data. This allows us to optimize website content.

Name	Purpose	Lifetime	Type	Provider
_pk_id	Used to store a few details about the user such as the unique visitor ID.	13 months	HTML	Matomo
_pk_ref	Used to store the attribution information, the referrer initially used to visit the website.	6 months	HTML	Matomo
_pk_ses	Short lived cookie used to temporarily store data for the visit.	30 minutes	HTML	Matomo