Veröffentlichung publiziert

F. Naumann, J. Reck, H. Gargouri, B. Gruska, A. Blümich, A. Mahmoodinezhad, C. Janowitz, K. Henkel, J. I. Flege:
In-situ real-time and ex-situ spectroscopic analysis of Al₂O₃ films prepared by plasma enhanced atomic layer deposition
Journal of Vacuum Science and Technology B 38 (2020) 014014
Online (DOI)
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