Paper published

A joint publication with coauthors from SENTECH Instruments GmbH, Berlin, has been published in »Journal of Vacuum Science and Technology A« and has been selected as »Editor's Pick« by the editors .

A. Mahmoodinezhad, C. Janowitz, F. Naumann, P. Plate, H. Gargouri, K. Henkel, D. Schmeißer, J. I. Flege
Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Journal of Vacuum Science and Technology A, 38 (2020) 022404
Online (DOI)
This article may be downloaded here for personal use only. Any other use requires prior permission of the author and AIP Publishing.

Contact persons

Ali Mahmoodinezhad
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5355
Ali.Mahmoodinezhad(at)b-tu.de

Dr.-Ing. Karsten Henkel
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5354
karsten.henkel(at)b-tu.de

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