Paper in »Inorganics« - Chair of Applied Physics and Semiconductor Spectroscopy

A manuscript with co-authors from »IHP—Leibniz Instituts für Innovative Mikroelektronik« has been published in »Inorganics«.

C. Morales, A. Mahmoodinezhad, R. Tschammer, J. Kosto, C. Alvarado Chavarin, M. A. Schubert, C. Wenger, K. Henkel, J. I. Flege
Combination of multiple operando and in-situ characterization techniques in a single cluster system for atomic layer deposition: Unraveling the early stages of growth of ultrathin Al₂O₃ films on metallic Ti substrates
Inorganics 11 (2023) 477
Online (DOI)

Contact person

Dr. Carlos Morales Sanchez
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5359
Carlos.MoralesSanchez(at)b-tu.de

Prof. Dr. rer. nat. habil. Jan Ingo Flege
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5352
flege(at)b-tu.de

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