Paper in »ACS Applied Materials & Interfaces« - Chair of Applied Physics and Semiconductor Spectroscopy

A manuscript with coauthors from the Leibniz Institute for Solid State and Materials Research Dresden, Fraunhofer Institute for Microelectronic Circuits and Systems Duisburg, Technical University Dresden, Ruhr University Bochum, and Charles University Prague (Czech Republic) has been published in the journal »ACS Applied Materials & Interfaces«.

R. Tschammer, M. Schmickler, Y. Kosto, K. Henkel, P. Kaur, A. Devi, C. Morales, J. I. Flege
Defect Engineering in Atomic-Layer Deposited Cerium Oxide
ACS Applied Materials & Interfaces 18 (2026) 18380-18393
Online (DOI)

Contact

Rudi Tschammer
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5359
rudi.tschammer(at)b-tu.de

Prof. Dr. rer. nat. habil. Jan Ingo Flege
Angewandte Physik und Halbleiterspektroskopie
T +49 (0) 355 69-5352
flege(at)b-tu.de

Table of content [ACS Applied Materials & Interfaces 18 (2026) 18380-18393]

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