Chair of
Applied physics / sensor technology
Prof. Dr. rer. nat. habil. Dieter Schmeißer
Publications 2011
11_17 Atomic Layer Deposition of Ruthenium Films from (Ethylcyclopentadienyl)(pyrrolyl)ruthenium and Oxygen K. Kukli, M. Kemell, E. Puukilainen, J. Aarik, A. Aidla, T. Sajavaara, M. Laitinen, M. Tallarida, J. Sundqvist, M. Ritala, M. Leskelä Journal of the Electrochemical Society 158/3 (2011) D158-D165. Online (DOI)
11_16 In situ determination of laser induced degradation of micro-mirror arrays A. Mai, U. Dauderstadt, D. Pahner, M. Krellmann, D. Schmeißer, M. Wagner Students and Young Scientists Workshop "Photonics and Microsystems", 2011 International, S. 84-88. DOI: 10.1109/STYSW.2011.6155850 Online (DOI)
11_15 Control of the Crystalline Polymorph, Molecular Dipole and Chain Orientations in P(VDF-HFP) for High Electrical Energy Storage Application D. Mandal, K. Henkel, D. Schmeißer International Conference on Nanoscience, Technology and Societal Implications (NSTSI), 2011, DOI: 10.1109/NSTSI.2011.6111801 Online (DOI)
11_14 Ultrathin TaN/Ta barrier modifications to fullfill next technology node requirements L. Gerlich, S. Ohsiek, C. Klein, M. Geiss, M. Friedemann, P. Kücher, D. Schmeißer Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, DOI: 10.1109/IITC.2011.5940322 Online (DOI)
11_13 Fullerenol as probed by Synchrotron X-Ray Photoemission and Absorption Spectroscopy D. Friedrich, K. Henkel, M. Richter, D. Schmeißer BioNanoScience 1 (2011) 218-223 Online (DOI) An author-created version may be downloaded here for personal use only. The final publication is available at www.springerlink.com (see DOI above).
11_12 Atomic-scale engineering of future high-k dynamic random access memory dielectrics: The example of partial Hf substitution by Ti in BaHfO3 P. Dudek, G. Lupina, G. Kozlowski, P. Zaumseil, J. Bauer, O. Fursenko, J. Dabrowski, R. Schmidt, G. Lippert, H.-J. Müssig, T. Schroeder, D. Schmeißer, E. Zschech Journal of Vacuum Science and Technology B 29/1 (2011) 01AC03 Online (DOI)
11_11 Experimental electronic structure of In2O3 and Ga2O3 C. Janowitz, V. Scherer, M. Mohamed, A. Krapf, H. Dwelk, R. Manzke, Z. Galazka, R. Uecker, K. Irmscher, R. Fornari, M. Michling, D. Schmeißer, J. R. Weber, J. B. Varley, C. G. Van deWalle New Journal of Physics 13 (2011) 085014 Online (DOI)
11_10 Comment on “Preparation and Characterization of Silver-Poly(vinylidene fluoride) Nanocomposites: Formation of Piezoelectric Polymorph of Poly(vinylidene fluoride)” D. Mandal, K. Henkel, D. Schmeißer The Journal of Physical Chemistry B 115 (2011) 10567-10569 Online (DOI)
11_09 Atomic layer deposition reactor for fabrication of metal oxides K. Kolanek, M. Tallarida, M. Michling, K. Karavaev, D. Schmeißer Physica Status Solidi C 8 (2011) 1287-1292 Online (DOI)
11_08 Substrate Reactivity Effects in the Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum on Ruthenium M. Tallarida, K. Kukli, M. Michling, M. Ritala, M. Leskelä, D. Schmeißer Chemistry of Materials 23 (2011) 3159-3168 Online (DOI)
11_07 Growth of TiO2 with Thermal and Plasma Enhanced Atomic Layer Deposition M. Tallarida, D. Friedrich, M. Städter, M. Michling, D. Schmeißer Journal of Nanoscience and Nanotechnology 11 (2011) 8049-8053 Online (DOI)
11_06 Surface chemistry and Fermi level movement during the self-cleaning of GaAs by trimethyl-aluminum M. Tallarida, C. Adelmann, A. Delabie, S. Van Elshocht, M. Caymax, D. Schmeißer Applied Physícs Letters 99 (2011) 042906 Online (DOI)
11_05 Influence of Na on the structure of Bi4Ti3O12 films deposited by liquid-delivery spin MOCVD J. Schwarzkopf, R. Dirsyte, A. Devi, A. Kwasniewski, M. Schmidbauer, G. Wagner, M. Michling, D. Schmeißer, R. Fornari Thin Solid Films 519 (2011) 5754-5759 Online (DOI)
11_04 Atomic layer deposition of nanolaminate oxide films on Si M. Tallarida, M. Weisheit, K. Kolanek, M. Michling, H. J. Engelmann, D. Schmeißer Journal of Nanoparticle Research 13 (2011) 5975-5983 Online (DOI)
11_03 Pr-O-Al-N dielectrics for metal insulator semiconductor stacks K. Henkel, M. Torche, R. Sohal, K. Karavaev, Y. Burkov, C. Schwiertz, D. Schmeißer Physica Status Solidi A 208/2 (2011) 317-329 Online (DOI)
11_02 Spin coated organic ferroelectric films for non volatile memories K. Müller, K. Henkel, D. Mandal, B. Seime, I. Paloumpa, D. Schmeißer Physica Status Solidi A 208/2 (2011) 330-342 Online (DOI)
11_01 Field effect transistors on graphitized polymer surfaces Y. Koval, I. Lazareva, P. Müller, K. Müller, K. Henkel, D. Friedrich Physica Status Solidi B 248/2 (2011) 299-308 online (DOI)
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